scholarly journals Surface quality control of thin SiN layer by optical measurements

2021 ◽  
Vol 13 (3) ◽  
pp. 61
Author(s):  
Jakub Gierowski ◽  
Sandra Pawłowska
Keyword(s):  
Refractive Index ◽  
Surface Quality ◽  
Surface Passivation ◽  
Fiber Optic ◽  
Optical Measurements ◽  
Low Coherence ◽  
Box Plots ◽  
Wide Range ◽  
Fabry Perot

Fiber optic interferometers have a wide range of applications including biological and chemical measurements. Nevertheless, in case of a reflective interferometer setup, standard silver mirrors cannot be used in every measurement, due to their chemical activity. In this work, we investigate the surface quality of a thin optical layer of silicon nitride (SiN) which can serve as an alternative material for silver mirrors. We present measurements carried out with a Fabry-Perot fiber optic interferometer working in a reflective mode. Measurement results allow us to determine the surface quality of the investigated layer. Full Text: PDF ReferencesK. Karpienko, M.S. Wróbel, M. Jedrzejewska-Szczerska, "Determination of refractive index dispersion using fiber-optic low-coherence Fabry-Perot interferometer: implementation and validation", Opt Express, 53, 077103 (2014). CrossRef Jedrzejewska-Szczerska M., Gnyba M., Kosmowski B. B. "Low-coherence fibre-optic interferometric sensors", Acta Phys. Pol. A 120, 621 (2011). CrossRef M. Jedrzejewska-Szczerska "Response of a new low-coherence Fabry-Perot sensor to hematocrit levels in human blood",Sensors 14(4), 6965 (2014). CrossRef M. Kosowska, D. Majchrowicz, K.J. Sankaran, M. Ficek, K. Haenen, M. Szczerska, "Doped Nanocrystalline Diamond Films as Reflective Layers for Fiber-Optic Sensors of Refractive Index of Liquids", Materials 12, 2124 (2019). CrossRef Shou-YiChang, Yi-Chung Huang, "Analyses of interface adhesion between porous SiO2 low-k film and SiC/SiN layers by nanoindentation and nanoscratch tests", Microelectron. Eng. 84(2), 319 (2007). CrossRef X. Wang, C. Wang, X. Shen, F. Sun, "Potential Material for Fabricating Optical Mirrors: Polished Diamond Coated Silicon Carbide". Appl. Opt. 56, 4113 (2017). CrossRef G. Coppola, P. Ferraro, M. Iodice, S. De Nicola, "Method for measuring the refractive index and the thickness of transparent plates with a lateral-shear, wavelength-scanning interferometer", Appl. Opt. 42, 3882 (2003). CrossRef H. Mäckel, R. Lüdemann, "Detailed study of the composition of hydrogenated SiNx layers for high-quality silicon surface passivation", J. Appl, Phys. 92, 2602 (2002). CrossRef N. Atman, M. Krzywinski, "Visualizing samples with box plots", Nat. Methods, 11(2), 119 (2014). CrossRef M. Vignesh, R. Balaji, "Data analysis using Box and Whisker Plot for Lung Cancer", International Conference on Innovations in Power and Advanced Computing Technologies,(2017). CrossRef

scholarly journals Fiber optic microsphere with ZnO thin film for potential application in refractive index sensor – theoretical study

2018 ◽  
Vol 10 (3) ◽  
pp. 85 ◽  
Author(s):  
Marzena Hirsch
Keyword(s):  
Thin Film ◽  
Refractive Index ◽  
Optical Fiber ◽  
Fiber Optic ◽  
Refractive Index Sensor ◽  
Zno Thin Film ◽  
Sensors And Actuators ◽  
Low Coherence ◽  
Refractive Index Sensing ◽  
Fabry Perot

Optical fiber sensors of refractive index play important role in analysis of biological and chemical samples. This work presents a theoretical investigation of a spectral response of fiber optic microsphere with zinc-oxide (ZnO) thin film deposited on the surface and evaluates the prospect of using such structure for refractive index sensing. Microsphere is fabricated by optical fiber tapering method on the base of a single mode fiber. A numerical model is described and simulation was conducted to assess the influence of the ZnO layer deposition on a reflected signal. The results indicate that ZnO film improves the performance in terms of a potential application in refractive index sensor. Full Text: PDF ReferencesY. Qian, Y. Zhao, Q. Wu, Y. Yang, Review of salinity measurement technology based on optical fiber sensor, Sensors and Actuators B: Chemical, 260, 86–105 (2018). CrossRef M. Jędrzejewska-Szczerska, Response of a New Low-Coherence Fabry-Pérot Sensor to Hematocrit Levels in Human Blood, Sensors, 14, 4, 6965–6976, (2014). CrossRef F. Sequeira et al., Refractive Index Sensing with D-Shaped Plastic Optical Fibers for Chemical and Biochemical Applications, Sensors, 16, 12, 2119, (2016). CrossRef M. Jędrzejewska-Szczerska et al., ALD thin ZnO layer as an active medium in a fiber-optic Fabry–Pérot interferometer, Sensors and Actuators A: Physical, 221, 88–94, (2015). CrossRef M. Hirsch, D. Majchrowicz, P. Wierzba, M. Weber, M. Bechelany, M. Jędrzejewska-Szczerska, Low-Coherence Interferometric Fiber-Optic Sensors with Potential Applications as Biosensors, Sensors, 17, 2, 261, (2017). CrossRef M. Hirsch, P. Wierzba, M. Jędrzejewska-Szczerska, Application of thin dielectric films in low coherence fiber-optic Fabry-Pérot sensing interferometers: comparative study, Proc. SPIE 10161, 101610D (2016). CrossRef J. Pluciński, K. Karpienko, Fiber optic Fabry-Pérot sensors: modeling versus measurements results, Proc. SPIE 10034, 100340H (2016). CrossRef F. Goldsmith, Quasioptical systems: Gaussian beam quasioptical propagation and applications. (Piscataway, NJ: IEEE Press 1998). CrossRef

scholarly journals Preparation and Characterization of Microsphere ZnO ALD Coating Dedicated for the Fiber-Optic Refractive Index Sensor

Nanomaterials ◽  
2019 ◽  
Vol 9 (2) ◽  
pp. 306 ◽  
Author(s):  
Paulina Listewnik ◽  
Marzena Hirsch ◽  
Przemysław Struk ◽  
Matthieu Weber ◽  
Mikhael Bechelany ◽  
...  
Keyword(s):  
Refractive Index ◽  
Optical Fiber ◽  
Fiber Optic ◽  
Single Mode ◽  
Atomic Layer ◽  
Fiber Optic Sensor ◽  
Refractive Index Sensor ◽  
Layer Deposition ◽  
Fabry Perot

We report the fabrication of a novel fiber-optic sensor device, based on the use of a microsphere conformally coated with a thin layer of zinc oxide (ZnO) by atomic layer deposition (ALD), and its use as a refractive index sensor. The microsphere was prepared on the tip of a single-mode optical fiber, on which a conformal ZnO thin film of 200 nm was deposited using an ALD process based on diethyl zinc (DEZ) and water at 100 °C. The modified fiber-optic microsphere was examined using scanning electron microscopy and Raman spectroscopy. Theoretical modeling has been carried out to assess the structure performance, and the performed experimental measurements carried out confirmed the enhanced sensing abilities when the microsphere was coated with a ZnO layer. The fabricated refractive index sensor was operating in a reflective mode of a Fabry–Pérot configuration, using a low coherent measurement system. The application of the ALD ZnO coating enabled for a better measurement of the refractive index of samples in the range of the refractive index allowed by the optical fiber. The proof-of-concept results presented in this work open prospects for the sensing community and will promote the use of fiber-optic sensing technologies.

The Spectrum of a Bent Fiber Fabry-Perot Interferometer under Small Variations of the Refractive Index of the Environment

2013 ◽  
Vol 677 ◽  
pp. 363-367
Author(s):  
Yuri N. Kulchin ◽  
Oleg B. Vitrik ◽  
Stanislav O. Gurbatov
Keyword(s):  
Refractive Index ◽  
Optical Fibre ◽  
Ambient Medium ◽  
Fibre Optic ◽  
Core Mode ◽  
Wide Range ◽  
Fabry Perot ◽  
Resonance Coupling ◽  
Refractive Index Sensors

The phase of light propagating through a bent optical fibre is shown to depend on the refractive index of the medium surrounding the fibre cladding when there is resonance coupling between the guided core mode and cladding modes. This shifts the spectral maxima in the bent fibre-optic Fabry–Perot interferometer. The highest phase and spectral sensitivities achieved with this interferometer configuration are 0,71 and 0,077, respectively, and enable changes in the refractive index of the ambient medium down to 5∙10–6 to be detected. This makes the proposed approach potentially attractive for producing highly stable, precision refractive index sensors capable of solving a wide range of liquid refractometry problems.

Laser-micromachined Fabry-Perot fiber-optic tip sensor for temperature-independent measurement of refractive index

2008 ◽  
Author(s):  
Zeng-Ling Ran ◽  
Yun-Jiang Rao ◽  
Wei-Jun Liu ◽  
Xian Liao ◽  
Kin-Seng Chiang
Keyword(s):  
Refractive Index ◽  
Fiber Optic ◽  
Independent Measurement ◽  
Fabry Perot

Preparation and Experimental Study of the Complex Shape Carbide Diamond Coated Tools

2013 ◽  
Vol 579-580 ◽  
pp. 153-157
Author(s):  
You Yi Zheng ◽  
Chun Lin Zhang ◽  
Xing Xin Xu
Keyword(s):  
Surface Quality ◽  
Cutting Tools ◽  
Diamond Films ◽  
Complex Surface ◽  
End Mill ◽  
Laser Raman ◽  
Coated Tools ◽  
Wide Range ◽  
Hot Filament

The CVD diamond films have a series of excellent performances, so it has a wide range of applications in the cutting tools, wearable devices, electrochemical electrodes and other fields, and it has a very substantial market prospects. In this study, The diamond films with a layer of uniform and smooth were deposited on the surface of the complex surface YG6 carbide end mill by using the hot filament CVD method, the quality of diamond films was detected by using the scanning electron microscopy and the laser Raman spectrometer. The cutting performances of diamond coated end mill were evaluated from the workpiece surface quality and tool life two aspects by cutting silicon carbide aluminum reinforced composites, and compared with the uncoated carbide tools. The experimental results show that because of the cutting tool was pretreated that make tool surface coarsening, leading the surface quality was machined by diamond coated tools is lower than the carbide cutting tools. However, the coating can protect the tools, increase the wear resistance of the coated tools and make the life of the diamond coated tools increase 3-5 times than the carbide cutting tools.

Integrated Fiber-Optic Fabry-Pérot Interferometer Sensor for Simultaneous Measurement of Liquid Refractive Index and Temperature

2019 ◽  
Vol 19 (13) ◽  
pp. 5007-5013 ◽  
Author(s):  
Wei Zhang ◽  
Yinggang Liu ◽  
Ting Zhang ◽  
Danqing Yang ◽  
Yuxi Wang ◽  
...  
Keyword(s):  
Refractive Index ◽  
Simultaneous Measurement ◽  
Fiber Optic ◽  
Fabry Perot
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