Effects of SiO2 hard masks on si nanophotonic waveguide loss for photonic device integration
2014 ◽
Vol 26
(1)
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pp. 70-73
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1994 ◽
Vol 7
(3)
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pp. 132-139
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Keyword(s):
2012 ◽
Vol 159
(5)
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pp. H507-H510
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2013 ◽
Vol 2
(9)
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pp. N169-N174
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2018 ◽
Vol 10
(10)
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pp. 8985-8992
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2015 ◽
Vol 2
(8)
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pp. 086302
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