Optimized indium oxide films prepared by DC magnetron sputtering

1997 ◽  
Author(s):  
A. Axelevitch ◽  
E. Rabinovitch ◽  
G. Golan
Keyword(s):  
Magnetron Sputtering ◽  
Indium Oxide ◽  
Oxide Films ◽  
Dc Magnetron Sputtering ◽  
Indium Oxide Films

Chemical characterization of as-deposited microcrystalline indium oxide films prepared by reactive dc magnetron sputtering

1998 ◽  
Vol 67 (3) ◽  
pp. 295-301 ◽  
Author(s):  
C. Xirouchaki ◽  
K. Moschovis ◽  
E. Chatzitheodoridis ◽  
G. Kiriakidis ◽  
P. Morgen
Keyword(s):  
Magnetron Sputtering ◽  
Indium Oxide ◽  
Oxide Films ◽  
Chemical Characterization ◽  
Dc Magnetron Sputtering ◽  
Indium Oxide Films

Study on Crystallinity of Tin-Doped Indium Oxide Films Deposited by DC Magnetron Sputtering

1998 ◽  
Vol 37 (Part 1, No. 4A) ◽  
pp. 1870-1876 ◽  
Author(s):  
Pung Keun Song ◽  
Yuzo Shigesato ◽  
Itaru Yasui ◽  
Cleva W. Ow-Yang ◽  
David C. Paine
Keyword(s):  
Magnetron Sputtering ◽  
Indium Oxide ◽  
Oxide Films ◽  
Dc Magnetron Sputtering ◽  
Indium Oxide Films

Structure and Internal Stress of Tin-Doped Indium Oxide and Indium–Zinc Oxide Films Deposited by DC Magnetron Sputtering

2007 ◽  
Vol 46 (12) ◽  
pp. 7806-7811 ◽  
Author(s):  
Eriko Nishimura ◽  
Tomoko Sasabayashi ◽  
Norihiro Ito ◽  
Yasushi Sato ◽  
Kentaro Utsumi ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Internal Stress ◽  
Indium Oxide ◽  
Oxide Films ◽  
Dc Magnetron Sputtering ◽  
Zinc Oxide Films ◽  
Indium Zinc Oxide
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