Impact of miniaturization on the current handling of electrostatic MEMS resonators

2007 ◽  
Author(s):  
Manu Agarwal ◽  
Harsh Mehta ◽  
Robert N. Candler ◽  
Saurabh A. Chandorkar ◽  
Bongsang Kim ◽  
...  
Keyword(s):  
Mems Resonators ◽  
Electrostatic Mems

Analysis of the Orbits of Electrostatic MEMS Resonators

2008 ◽  
Author(s):  
F. Najar ◽  
E. M. Abdel-Rahman ◽  
A. H. Nayfeh ◽  
S. Choura
Keyword(s):  
Initial Conditions ◽  
Order Approximation ◽  
Differential Quadrature Method ◽  
Basin Of Attraction ◽  
Mems Resonator ◽  
Mems Resonators ◽  
Electrostatic Mems ◽  
Differential Integral Equation ◽  
First Order Approximation ◽  
The Basin Of Attraction

We study the dynamic behavior of an electrostatic MEMS resonator using a model that accounts for the system nonlinearities due to mid-plane stretching and electrostatic forcing. The partial-differential-integral equation and associated boundary conditions representing the system dynamics are discretized using the Differential Quadrature Method (DQM) and the Finite Difference Method (FDM) for the space and time derivatives, respectively. The resulting model is analyzed to determine the periodic orbits of the resonator and their stability. Simultaneous resonances are identified for large orbits. Finally, we develop a first-order approximation of the microbeam dynamic response, which reveals an erosion of the basin of attraction of the stable orbits that depends heavily on the amplitude and frequency of the AC excitation. Simulations show that the smoothness of the boundary of the basin of attraction can be lost to be replaced by fractal tongues, which increase the sensitivity of the microbeam response to initial conditions. As a result, the locations of the stable and unstable fixed points are likely to be disturbed.

Nanostrain Resolution Strain Sensing by Monocrystalline 3C-SiC on SOI Electrostatic MEMS Resonators

2020 ◽  
Vol 29 (1) ◽  
pp. 117-128 ◽  
Author(s):  
Luca Belsito ◽  
Matteo Bosi ◽  
Fulvio Mancarella ◽  
Matteo Ferri ◽  
Alberto Roncaglia
Keyword(s):  
Strain Sensing ◽  
Mems Resonators ◽  
Electrostatic Mems

Modelling MEMS Resonators Past Pull-In

2008 ◽  
Author(s):  
Chandrika P. Vyasarayani ◽  
Eihab M. Abdel-Rahman ◽  
John McPhee ◽  
Stephen Birkett
Keyword(s):  
Differential Equation ◽  
Mathematical Model ◽  
Partial Differential Equation ◽  
Numerical Solution ◽  
Nonlinear Ordinary Differential Equations ◽  
Mems Resonators ◽  
Electrostatic Mems ◽  
Stationary Electrode ◽  
External Forces ◽  
The Galerkin Method

In this paper, we develop a mathematical model of an electrostatic MEMS beam undergoing impact with a stationary electrode subsequent to pull-in. We model the contact between the beam and the substrate using a nonlinear foundation of springs and dampers. The system partial differential equation (PDE) is converted into coupled nonlinear ordinary differential equations (ODEs) using the Galerkin method. A numerical solution is obtained by treating all nonlinear terms as external forces.

Nonlinear Characterization of Electrostatic MEMS Resonators

2006 ◽  
Author(s):  
Manu Agarwal ◽  
Kwan Park ◽  
Rob Candler ◽  
Bongsang Kim ◽  
Matthew Hopcroft ◽  
...  
Keyword(s):  
Nonlinear Characterization ◽  
Mems Resonators ◽  
Electrostatic Mems

Stabilizing the Dynamics of Electrostatic MEMS Resonators Using Delayed Feedback Controller

2009 ◽  
Author(s):  
Fadi M. Alsaleem ◽  
Mohammad I. Younis
Keyword(s):  
Delayed Feedback ◽  
Feedback Controller ◽  
Superior Performance ◽  
Mems Resonator ◽  
Mems Resonators ◽  
Electrostatic Mems ◽  
Delayed Feedback Controller ◽  
Simulation And Experiment ◽  
The Stability ◽  
Selection Of

We study the effect of delayed feedback controller on the dynamic stability of a MEMS resonator actuated with DC and AC voltages. We show that the delayed feedback controller, with a careful selection of its parameters, can be used to stabilize an originally unstable resonator operating in the escape (dynamic pull-in) frequency band. Also, the controller is shown to enhance the stability of the resonator near pull-in, where it experiences a strong fractal behavior. In both cases, the controller shows superior performance in rejecting disturbances. Experimental and theoretical results are presented to demonstrate the capability of the feedback controller to stabilize the performance of the capacitive resonator. A good agreement between simulation and experiment was achieved.

Modeling MEMS Resonators Past Pull-In

2011 ◽  
Vol 6 (3) ◽  
Author(s):  
Chandrika P. Vyasarayani ◽  
Eihab M. Abdel-Rahman ◽  
John McPhee ◽  
Stephen Birkett
Keyword(s):  
Natural Frequencies ◽  
Contact Length ◽  
Mode Shapes ◽  
Nonlinear Ordinary Differential Equations ◽  
Micro Electro Mechanical Systems ◽  
Mems Resonators ◽  
Electrostatic Mems ◽  
Stationary Electrode ◽  
External Forces ◽  
The Galerkin Method

In this paper, we develop a mathematical model of an electrostatic MEMS (Micro-Electro-Mechanical systems) beam undergoing impact with a stationary electrode subsequent to pull-in. We model the contact between the beam and the substrate using a nonlinear foundation of springs and dampers. The system partial differential equation is converted into coupled nonlinear ordinary differential equations using the Galerkin method. A numerical solution is obtained by treating all nonlinear terms as external forces. We use the model to predict the contact length, natural frequencies, and mode shapes of the beam past pull-in voltage as well as the dynamic response of a shunt switch in a closing and opening sequence.

scholarly journals AMPLITUDE NOISE INDUCED PHASE NOISE IN ELECTROSTATIC MEMS RESONATORS

2006 ◽  
Author(s):  
M. Agarwal ◽  
K.K. Park ◽  
B. Kim ◽  
M.A. Hopcroft ◽  
S.A. Chandorkar ◽  
...  
Keyword(s):  
Phase Noise ◽  
Amplitude Noise ◽  
Mems Resonators ◽  
Electrostatic Mems
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