Micromachined aluminum nitride acoustic resonators with an epitaxial silicon carbide layer utilizing high-order Lamb wave modes

2012 ◽  
Author(s):  
Chih-Ming Lin ◽  
Yung-Yu Chen ◽  
Valery V. Felmetsger ◽  
Gabriele Vigevani ◽  
Debbie G. Senesky ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Aluminum Nitride ◽  
Lamb Wave ◽  
High Order ◽  
Epitaxial Silicon ◽  
Acoustic Resonators ◽  
Carbide Layer ◽  
Wave Modes

Influence of Orientation of a Silicon Substrate with a Buffer Silicon Carbide Layer on Dielectric and Polar Properties of Aluminum Nitride Films

2019 ◽  
Vol 61 (12) ◽  
pp. 2386-2391 ◽  
Author(s):  
O. N. Sergeeva ◽  
A. V. Solnyshkin ◽  
D. A. Kiselev ◽  
T. S. Il’ina ◽  
S. A. Kukushkin ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Aluminum Nitride ◽  
Silicon Substrate ◽  
Carbide Layer

Performance optimization of high-order Lamb wave sensors based on silicon carbide substrates

Ultrasonics ◽  
2016 ◽  
Vol 65 ◽  
pp. 296-303 ◽  
Author(s):  
Zhe Chen ◽  
Li Fan ◽  
Shu-yi Zhang ◽  
Hui Zhang
Keyword(s):  
Silicon Carbide ◽  
Performance Optimization ◽  
Lamb Wave ◽  
High Order ◽  
Wave Sensors

Two-port filters and resonators on AlN/3C-SiC plates utilizing high-order Lamb wave modes

2013 ◽  
Author(s):  
Chih-Ming Lin ◽  
Yung-Yu Chen ◽  
Valery V. Felmetsge ◽  
Debbie G. Senesky ◽  
Albert P. Pisano
Keyword(s):  
Lamb Wave ◽  
High Order ◽  
Wave Modes

Dispersion characteristics of high-order lamb wave modes in an AlN/3C-SiC layered plate

2012 ◽  
Author(s):  
Chih-Ming Lin ◽  
Yung-Yu Chen ◽  
Valery V. Felmetsger ◽  
Debbie G. Senesky ◽  
Albert P. Pisano
Keyword(s):  
Lamb Wave ◽  
High Order ◽  
Dispersion Characteristics ◽  
Layered Plate ◽  
Wave Modes

An oscillator using high order Lamb wave modes

2009 ◽  
Vol 70 (11-12) ◽  
pp. 1446-1448 ◽  
Author(s):  
Wei Lin ◽  
Li Fan ◽  
Chang-ming Gan ◽  
Zhe-min Zhu ◽  
Xiang-bang Wang
Keyword(s):  
Lamb Wave ◽  
High Order ◽  
Wave Modes

Self-Bonded Silicon Carbide Layer on Carbon Foil: Preparation and Properties

2013 ◽  
Vol 6 (3) ◽  
pp. 253-257 ◽  
Author(s):  
Sergey Brantov ◽  
Dmitry Borisenko ◽  
Ivan Shmytko ◽  
Edward Steinman
Keyword(s):  
Silicon Carbide ◽  
Carbon Foil ◽  
Carbide Layer

A New Class of High-Overtone Bulk Acoustic Resonators Using Lithium Niobate on Conductive Silicon Carbide

2021 ◽  
pp. 1-1
Author(s):  
Jinbo Wu ◽  
Shibin Zhang ◽  
Hongyan Zhou ◽  
Pengcheng Zheng ◽  
Liping Zhanga ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Lithium Niobate ◽  
Acoustic Resonators ◽  
New Class ◽  
High Overtone

Synthesis of Aluminum Nitride-Silicon Carbide Solid Solutions by Combustion Nitridation

2004 ◽  
Vol 83 (5) ◽  
pp. 1108-1112 ◽  
Author(s):  
Manshi Ohyanagi ◽  
Kenshiro Shirai ◽  
Nadejda Balandina ◽  
Masaaki Hisa ◽  
Zuhair A. Munir
Keyword(s):  
Silicon Carbide ◽  
Aluminum Nitride ◽  
Solid Solutions

scholarly journals Potential of epitaxial silicon carbide microbeam resonators for chemical sensing

2016 ◽  
Vol 214 (4) ◽  
pp. 1600437 ◽  
Author(s):  
Atieh R. Kermany ◽  
James S. Bennett ◽  
Victor M. Valenzuela ◽  
Warwick P. Bowen ◽  
Francesca Iacopi
Keyword(s):  
Silicon Carbide ◽  
Chemical Sensing ◽  
Epitaxial Silicon

Contribution of Lamb wave modes in the formation of higher order modes cluster (HOMC) guided waves

2021 ◽  
pp. 095440622110424
Author(s):  
Z Abbasi ◽  
F Honarvar
Keyword(s):  
Finite Element ◽  
Wave Packet ◽  
Lamb Wave ◽  
Guided Waves ◽  
Element Model ◽  
Higher Order ◽  
Guided Wave ◽  
Cross Sectional ◽  
Higher Order Modes ◽  
Wave Modes

In recent years, Higher Order Modes Cluster (HOMC) guided waves have been considered for ultrasonic testing of plates and pipes. HOMC guided waves consist of higher order Lamb wave modes that travel together as a single nondispersive wave packet. The objective of this paper is to investigate the effect of frequency-thickness value on the contribution of Lamb wave modes in an HOMC guided wave. This is an important issue that has not been thoroughly investigated before. The contribution of each Lamb wave mode in an HOMC guided wave is studied by using a two-dimensional finite element model. The level of contribution of various Lamb wave modes to the wave cluster is verified by using a 2D FFT analysis. The results show that by increasing the frequency-thickness value, the order of contributing modes in the HOMC wave packet increases. The number of modes that comprise a cluster also increases up to a specific frequency-thickness value and then it starts to decrease. Plotting of the cross-sectional displacement patterns along the HOMC guided wave paths confirms the shifting of dominant modes from lower to higher order modes with increase of frequency-thickness value. Experimental measurements conducted on a mild steel plate are used to verify the finite element simulations. The experimental results are found to be in good agreement with simulations and confirm the changes observed in the level of contribution of Lamb wave modes in a wave cluster by changing the frequency-thickness value.

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