Combining high-resolution X-ray reciprocal space mapping and dark-field electron holography for strain analysis in 20 nm pMOS structures

2015 ◽  
Author(s):  
Aurele Durand ◽  
Victor Boureau ◽  
Delphine Lecunff ◽  
Axel Hourtane ◽  
Daniel Benoit ◽  
...  
Keyword(s):  
High Resolution ◽  
Strain Analysis ◽  
Dark Field ◽  
Space Mapping ◽  
Reciprocal Space ◽  
Electron Holography ◽  
Reciprocal Space Mapping ◽  
X Ray ◽  
Dark Field Electron ◽  
20 Nm

In-line monitoring of strain distribution using high resolution X-ray Reciprocal space mapping into 20 nm SiGe pMOS

2017 ◽  
Vol 70 ◽  
pp. 99-104 ◽  
Author(s):  
Aurèle Durand ◽  
Melissa Kaufling ◽  
Delphine Le-Cunff ◽  
Denis Rouchon ◽  
Patrice Gergaud
Keyword(s):  
High Resolution ◽  
Strain Distribution ◽  
Space Mapping ◽  
Reciprocal Space ◽  
Reciprocal Space Mapping ◽  
X Ray ◽  
20 Nm

Experimental and Theoretical Study of the Triple-Crystal High-Resolution X-Ray Diffraction Scheme in Reciprocal Space Mapping Technique

2019 ◽  
Vol 64 (4) ◽  
pp. 545-552 ◽  
Author(s):  
A. Yu. Seregin ◽  
P. A. Prosekov ◽  
F. N. Chukhovsky ◽  
Yu. A. Volkovsky ◽  
A. E. Blagov ◽  
...  
Keyword(s):  
High Resolution ◽  
Theoretical Study ◽  
Space Mapping ◽  
Reciprocal Space ◽  
Mapping Technique ◽  
X Ray Diffraction ◽  
Reciprocal Space Mapping ◽  
X Ray

scholarly journals High Resolution X-ray Reciprocal Space Mapping

1996 ◽  
Vol 89 (2) ◽  
pp. 115-127 ◽  
Author(s):  
G. Bauer ◽  
J.H. Li ◽  
V. Holy
Keyword(s):  
High Resolution ◽  
Space Mapping ◽  
Reciprocal Space ◽  
Reciprocal Space Mapping ◽  
X Ray

Shear strains in dry etched GaAs/AlAs wires studied by high resolution x-ray reciprocal space mapping

1998 ◽  
Vol 83 (1) ◽  
pp. 126-131 ◽  
Author(s):  
A. A. Darhuber ◽  
G. Bauer ◽  
P. D. Wang ◽  
C. M. Sotomayor Torres
Keyword(s):  
High Resolution ◽  
Space Mapping ◽  
Reciprocal Space ◽  
Reciprocal Space Mapping ◽  
X Ray ◽  
Shear Strains

High Resolution X-Ray Reciprocal Space Mapping of Wavy Layers

1997 ◽  
Vol 472 ◽  
Author(s):  
P. Kidd ◽  
P. F. Fewster
Keyword(s):  
High Resolution ◽  
Block Size ◽  
Space Mapping ◽  
Reciprocal Space ◽  
Interface Roughness ◽  
Reciprocal Space Mapping ◽  
X Ray ◽  
Wavy Interface ◽  
Thickness Variations ◽  
Inp Substrates

ABSTRACTWe apply the technique of High Resolution X-ray Reciprocal Space Mapping (HRRSM) to the study of wavy layers in InGaAs multilayer thin films on InP substrates. By accurately measuring the positions of the layer Bragg peaks in reciprocal space we obtain measurements of the compositions and residual coherency strains in the layers. We discuss the contributions to the diffuse scatter around the Bragg peaks from factors such as lattice tilts and interface roughness. By modelling the shapes of the diffraction profiles we obtain measurements of mosaic block size both perpendicular and parallel to the multilayer/substrate interface. We conclude that the wavy interface morphology arises predominantly from layer thickness variations rather than lattice tilts.

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