A Tunable Quasi-Zero Stiffness Mechanism for Thermal Compensation of a MEMS Gravimeter

Author(s):  
Xiaopeng Zhang ◽  
Xueyong Wei ◽  
Yang Gao ◽  
Minghui Zhao ◽  
Yonghong Qi ◽  
...  
Keyword(s):  
Procedia CIRP ◽  
2021 ◽  
Vol 99 ◽  
pp. 69-74
Author(s):  
Clemens Sulz ◽  
Jens Brier ◽  
Amir Agovic ◽  
Friedrich Bleicher

2000 ◽  
Author(s):  
Yoshio Yamamoto ◽  
Takaaki Makino ◽  
Hiro Matsui

Abstract Recently giant magnetostriction materials have drawn a lot of attention because of their unique features which other materials, such as PZT, cannot provide. The features include outstanding magnetostriction, high energy density, high Curie temperature, and quick response. This paper presents two kinds of novel applications of giant magnetostriction materials: a compact fine positioner and a wire clamper. The former is able to achieve highly accurate positioning due to a novel structure design which substantially reduces the influence of Joule heat generated by the solenoid coil. The latter application is motivated by a great demand towards a wire-clamping device for semiconductor manufacturing, which is capable of maintaining a sufficient clamping force without fatigue.


Laser Physics ◽  
2015 ◽  
Vol 25 (12) ◽  
pp. 125004 ◽  
Author(s):  
R Sun ◽  
C T Wu ◽  
M Yu ◽  
K Yu ◽  
C Wang ◽  
...  

Author(s):  
Yu Tian ◽  
Jun Zhang ◽  
Zong-jin Ren ◽  
Wei Liu ◽  
Zhenyuan Jia ◽  
...  

A piezoelectric dynamometer can produce thermal forces because of temperature fluctuations, thus affecting measurement precision. To investigate the influence of the thermal force on the dynamometer, this article proposes a hypothesis of decreasing the conduction power and establishes the function of a thermal force over time in an ordinary dynamometer based on the heat conduction differential equation. A novel double-sensor thermal compensation dynamometer is designed, with static calibration in constant temperature and force/heat coupling experiments, to solve the problem of the thermal force. The experimental results indicate that the nonlinearity and repeatability of the double-sensor thermal compensation dynamometer are less than 1% full scale (FS) of the static calibration at a constant temperature; in the force/heat coupling experiments, at a heating rate of 0.4 ℃/s to 110 ℃ with a loading force of 500 N, the maximal output deviation is less than 1.06% (FS), realizing the unidirectional thermal force compensation of the structure. The double-sensor thermal compensation dynamometer can be utilized in sharp temperature fluctuations environment, like rocket engine forces measurement.


Sign in / Sign up

Export Citation Format

Share Document