Smart Giant Magnetostriction Actuator With Self-Sensing and Thermal Compensation Capability
Abstract Recently giant magnetostriction materials have drawn a lot of attention because of their unique features which other materials, such as PZT, cannot provide. The features include outstanding magnetostriction, high energy density, high Curie temperature, and quick response. This paper presents two kinds of novel applications of giant magnetostriction materials: a compact fine positioner and a wire clamper. The former is able to achieve highly accurate positioning due to a novel structure design which substantially reduces the influence of Joule heat generated by the solenoid coil. The latter application is motivated by a great demand towards a wire-clamping device for semiconductor manufacturing, which is capable of maintaining a sufficient clamping force without fatigue.