Design of Piezoelectric Micro-Actuators Based on LiNbO3 Thin Film

2021 ◽  
Author(s):  
Yushuai Liu ◽  
Zhiyuan Gao ◽  
Kangfu Liu ◽  
Tao Wu
Keyword(s):  
Thin Film ◽  
Micro Actuators

Dynamics of Thin Film NiTi Cantilevers on Si

1993 ◽  
Vol 311 ◽  
Author(s):  
A.Peter Jardine ◽  
Peter G. Mercado
Keyword(s):  
Thin Film ◽  
Mechanical Properties ◽  
Response Times ◽  
Bulk Material ◽  
Fast Response ◽  
Free Standing ◽  
Promising Candidate ◽  
Strain Measurements ◽  
Micro Actuators ◽  
Cycling Time

ABSTRACTAlthough the thermo-mechanical properties of NiTi are well known for bulk material, its deposition and utilization as a thin film are still in their earliest stages of research. The deposition of thin-films of Shape Memory Effect NiTi onto Si(100) wafers offers several advantages over bulk NiTi, including fast response times and comparatively large transformation forces. This has made it a promising candidate material as micro-actuators for Micro-Electro-Mechanical (MEMS) systems as well as for strain measurements. The cycling time for actuation was measured for a 20 μm free standing NiTi thin film cantilever. It was demonstrated that cycling frequencies of up to 50 Hz are achievable.

Ferromagnetic Shape Memory Thin Film In-Plane Actuators: Assessment of Mechanical Output

2007 ◽  
Author(s):  
Vesselin Stoilov
Keyword(s):  
Thin Film ◽  
Shape Memory ◽  
Control Systems ◽  
Multiscale Model ◽  
Servo Control ◽  
Ferromagnetic Shape Memory Alloy ◽  
Shape Memory Actuators ◽  
Micro Actuators ◽  
Concurrent Simulation ◽  
Ferromagnetic Shape Memory

Ferromagnetic shape memory alloy micro actuators and motors are promising for applications in various servo control systems, with the potential to provide ultra(sub-nano)-precision positioning and compensation. This article shows that in an in-plane configuration, thin film ferromagnetic shape memory actuators open the possibility to reach more powerful actuators keeping the same geometric dimensions by simply stacking these films. The assessment of mechanical output for the FSMA thin film actuators have been done with a multiscale model, which allowed for concurrent simulation of the phenomena at atomic and mesoscale.

Resonant Torsional Micro-Actuators Using Thin-Film Lithium Niobate

2019 ◽  
Author(s):  
Ahmed Emad ◽  
Ruochen Lu ◽  
Ming-Huang Li ◽  
Yansong Yang ◽  
Tao Wu ◽  
...  
Keyword(s):  
Thin Film ◽  
Lithium Niobate ◽  
Micro Actuators

Fabrication of Silicon-Based Shape Memory Alloy Micro-Actuators

1992 ◽  
Vol 276 ◽  
Author(s):  
A. David Johnson ◽  
J. D. Busch ◽  
Curtis A. Ray ◽  
Charles Sloan
Keyword(s):  
Thin Film ◽  
Shape Memory Alloy ◽  
Shape Memory ◽  
Nickel Titanium ◽  
Titanium Film ◽  
Micro Electro Mechanical Systems ◽  
Actuation Mechanism ◽  
Micro Actuators ◽  
Chemical Milling ◽  
Silicon Based

ABSTRACTThin film shape memory alloy has been integrated with silicon in a new actuation mechanism for micro-electro-mechanical systems. This paper compares nickel-titanium film with other actuators, describes recent results of chemical milling processes developed to fabricate shape memory alloy micro-actuators in silicon, and describes simple actuation mechanisms which have been fabricated and tested.

Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor

2007 ◽  
Vol 133 (1) ◽  
pp. 35-44 ◽  
Author(s):  
Fabrice F.C. Duval ◽  
Stephen A. Wilson ◽  
Graham Ensell ◽  
Nicolas M.P. Evanno ◽  
Markys G. Cain ◽  
...  
Keyword(s):  
Thin Film ◽  
Force Sensor ◽  
Pzt Thin Film ◽  
Micro Actuators ◽  
Micro Force Sensor

Actuating Performance of Non-Passivated Micro Heaters

2006 ◽  
Author(s):  
Min Soo Kim ◽  
Yong Soo Lee ◽  
Bang Weon Lee ◽  
Dong Kee Sohn ◽  
Keon Kuk
Keyword(s):  
Thin Film ◽  
Narrow Range ◽  
Stress Test ◽  
Tantalum Nitride ◽  
Working Fluid ◽  
Driving Voltage ◽  
Input Energy ◽  
Bubble Test ◽  
Micro Actuators

Effects of thin film layers have been investigated on the actuating performance of micro heaters. Bubble behaviors on micro heaters were observed experimentally. Nine (9) kinds of tantalum nitride (TaN) micro heaters were prepared to have different thin film layers with same planar size of 22 μm by 22 μm. Step-stress test (SST) showed that maximum endurable voltage levels in the non-passivated heaters are less than 50% of those in the passivated heaters. Bubble test was carried out using de-ionized (DI) water as working fluid in an open pool. The results showed that the non-passivated heaters can produce comparable bubbles with only 20 to 50% of the input energy required for the passivated heaters. However, the non-passivated heaters could be operated only in a narrow range of driving voltage. Applicability of non-passivated heaters as promising micro actuators needs further investigation from the viewpoints of robustness and reliability.

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