High voltage pulse power implementation using IGBT stacks

2006 ◽  
Author(s):  
Jong-Hyun Kim ◽  
Myung-Hyo Ryu ◽  
Byung-Duk Min ◽  
Ju-Won Baek ◽  
Jong-Soo Kim ◽  
...  
Keyword(s):  
High Voltage ◽  
Voltage Pulse ◽  
High Voltage Pulse ◽  
Pulse Power

A high voltage pulse power supply for metal plasma immersion ion implantation and deposition

2010 ◽  
Vol 81 (12) ◽  
pp. 124703 ◽  
Author(s):  
M. C. Salvadori ◽  
F. S. Teixeira ◽  
W. W. R. Araújo ◽  
L. G. Sgubin ◽  
N. S. Sochugov ◽  
...  
Keyword(s):  
Ion Implantation ◽  
High Voltage ◽  
Power Supply ◽  
Voltage Pulse ◽  
High Voltage Pulse ◽  
Pulse Power ◽  
Pulse Power Supply ◽  
Metal Plasma ◽  
Plasma Immersion Ion Implantation
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