Two-Dimensional Fluid Model of Pulse Sheath in Plasma Immersion Ion Implantation With Dielectric Substrates

IEEE Transactions on Plasma Science ◽

10.1109/tps.2007.903880 ◽

2007 ◽

Vol 35 (5) ◽

pp. 1489-1495 ◽

Author(s):

Xue-Chun Li ◽

You-Nian Wang

Keyword(s):

Ion Implantation ◽

Fluid Model ◽

Two Dimensional ◽

Dielectric Substrates ◽

Plasma Immersion Ion Implantation

Download Full-text

Studies of the effects of the bore length during plasma immersion ion implantation of a small cylindrical bore with auxiliary electrode by two-dimensional fluid model

25th Anniversary, IEEE Conference Record - Abstracts. 1998 IEEE International Conference on Plasma Science (Cat. No.98CH36221) ◽

10.1109/plasma.1998.677723 ◽

2002 ◽

Author(s):

T.K. Kwok ◽

X.C. Zeng ◽

P.K. Chu

Keyword(s):

Ion Implantation ◽

Fluid Model ◽

Two Dimensional ◽

Auxiliary Electrode ◽

Cylindrical Bore ◽

Plasma Immersion Ion Implantation

Download Full-text

Numerical simulation of plasma immersion ion implantation of a finite-length cylindrical bore with auxiliary electrode by two-dimensional fluid model

25th Anniversary, IEEE Conference Record - Abstracts. 1998 IEEE International Conference on Plasma Science (Cat. No.98CH36221) ◽

10.1109/plasma.1998.677638 ◽

2002 ◽

Author(s):

T.K. Kwok ◽

T.E. Sheridan ◽

X.C. Zeng ◽

P.K. Chu

Keyword(s):

Numerical Simulation ◽

Ion Implantation ◽

Finite Length ◽

Fluid Model ◽

Two Dimensional ◽

Auxiliary Electrode ◽

Cylindrical Bore ◽

Plasma Immersion Ion Implantation

Download Full-text

Two-dimensional modeling and simulation for dynamic sheath expansion during plasma immersion ion implantation

IEEE Transactions on Plasma Science ◽

10.1109/27.774681 ◽

1999 ◽

Vol 27 (3) ◽

pp. 766-771 ◽

Author(s):

Shu Qin ◽

Yuanzhong Xhou ◽

Chung Chan

Keyword(s):

Ion Implantation ◽

Modeling And Simulation ◽

Two Dimensional ◽

Dimensional Modeling ◽

Plasma Immersion Ion Implantation

Download Full-text

Two-dimensional texture and sheath evolution in metal plasma immersion ion implantation

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2005.01.115 ◽

2005 ◽

Vol 200 (1-4) ◽

pp. 589-593 ◽

Author(s):

S. Mändl ◽

G. Thorwarth ◽

B. Stritzker ◽

B. Rauschenbach

Keyword(s):

Ion Implantation ◽

Two Dimensional ◽

Metal Plasma ◽

Plasma Immersion Ion Implantation

Download Full-text

Secondary-Electron Emission Effects in Plasma Immersion Ion Implantation with Dielectric Substrates

Chinese Physics Letters ◽

10.1088/0256-307x/21/2/042 ◽

2004 ◽

Vol 21 (2) ◽

pp. 364-366 ◽

Author(s):

Li Xue-Chun ◽

Wang You-Nian

Keyword(s):

Ion Implantation ◽

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Dielectric Substrates ◽

Plasma Immersion Ion Implantation

Download Full-text

Two-dimensional particle-in-cell plasma immersion ion implantation simulation of gear/windmill geometry in cylindrical co-ordinates along the (r–θ) plane

Surface and Coatings Technology ◽

10.1016/s0257-8972(02)00130-5 ◽

2002 ◽

Vol 156 (1-3) ◽

pp. 97-102 ◽

Author(s):

D.T.K Kwok ◽

R.K.Y Fu ◽

P.K Chu

Keyword(s):

Ion Implantation ◽

Two Dimensional ◽

Particle In Cell ◽

Cell Plasma ◽

Plasma Immersion Ion Implantation

Download Full-text

Three-dimensional effects for two-dimensional samples in plasma immersion ion implantation

Journal of Applied Physics ◽

10.1063/1.1760833 ◽

2004 ◽

Vol 96 (1) ◽

pp. 934-936 ◽

Author(s):

D. Manova ◽

H. Neumann ◽

S. Mändl ◽

B. Rauschenbach

Keyword(s):

Ion Implantation ◽

Three Dimensional ◽

Two Dimensional ◽

Dimensional Effects ◽

Plasma Immersion Ion Implantation

Download Full-text

Effects of strong magnetic field on plasma immersion ion implantation of dielectric substrates

Vacuum ◽

10.1016/j.vacuum.2009.04.073 ◽

2009 ◽

Vol 83 (12) ◽

pp. 1427-1430 ◽

Author(s):

Hamid Ghomi ◽

Mohammadreza Ghasemkhani

Keyword(s):

Magnetic Field ◽

Ion Implantation ◽

Strong Magnetic Field ◽

Dielectric Substrates ◽

Plasma Immersion Ion Implantation

Download Full-text

Effect of pulse rise time on charging effects in plasma immersion ion implantation with dielectric substrates with planar and cylindrical geometries

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2006.09.024 ◽

2007 ◽

Vol 201 (15) ◽

pp. 6569-6572 ◽

Author(s):

Xue-Chun Li ◽

You-Nian Wang

Keyword(s):

Ion Implantation ◽

Rise Time ◽

Pulse Rise Time ◽

Dielectric Substrates ◽

Plasma Immersion Ion Implantation ◽

Cylindrical Geometries

Download Full-text

Hydrodynamic and analytical models for plasma immersion ion implantation with dielectric substrates

IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science ◽

10.1109/plasma.1997.604449 ◽

2002 ◽

Author(s):

Yuanzhong Zhou ◽

Shu Qin ◽

Chung Chan

Keyword(s):

Ion Implantation ◽

Analytical Models ◽

Dielectric Substrates ◽

Plasma Immersion Ion Implantation

Download Full-text