Low temperature DC plasma CVD diamond and diamond-like carbon thin films

2003 ◽  
Author(s):  
H.J. Ramos ◽  
G.M. Malapit ◽  
A. Montecillo
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Cvd Diamond ◽  
Diamond Like Carbon ◽  
Plasma Cvd ◽  
Dc Plasma ◽  
Carbon Thin Films

Electrical conductivity improvement by iodine doping for diamond-like carbon thin-films deposited by microwave surface wave plasma CVD

2006 ◽  
Vol 15 (4-8) ◽  
pp. 645-648 ◽  
Author(s):  
Ashraf M.M. Omer ◽  
Sudip Adhikari ◽  
Sunil Adhikary ◽  
Mohamad Rusop ◽  
Hideo Uchida ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Conductivity ◽  
Surface Wave ◽  
Diamond Like Carbon ◽  
Plasma Cvd ◽  
Iodine Doping ◽  
Carbon Thin Films

Characteristics of nitrogen doped diamond-like carbon thin films grown by microwave surface-wave plasma CVD

2006 ◽  
Vol 15 (11-12) ◽  
pp. 1906-1908 ◽  
Author(s):  
Hare Ram Aryal ◽  
Sudip Adhikari ◽  
Sunil Adhikary ◽  
Hideo Uchida ◽  
Masayoshi Umeno
Keyword(s):  
Thin Films ◽  
Surface Wave ◽  
Diamond Like Carbon ◽  
Plasma Cvd ◽  
Nitrogen Doped ◽  
Carbon Thin Films

Diamond-like carbon thin films prepared by rf-plasma CVD

Vacuum ◽  
1991 ◽  
Vol 42 (16) ◽  
pp. 1058
Author(s):  
Jiang Jie ◽  
Liu Chenzan
Keyword(s):  
Thin Films ◽  
Rf Plasma ◽  
Diamond Like Carbon ◽  
Plasma Cvd ◽  
Carbon Thin Films

Effect of substrate bias voltage on the properties of diamond-like carbon thin films deposited by microwave surface wave plasma CVD

2008 ◽  
Vol 17 (4-5) ◽  
pp. 696-699 ◽  
Author(s):  
Sudip Adhikari ◽  
Dilip Chandra Ghimire ◽  
Hare Ram Aryal ◽  
Golap Kalita ◽  
Masayoshi Umeno
Keyword(s):  
Thin Films ◽  
Surface Wave ◽  
Bias Voltage ◽  
Diamond Like Carbon ◽  
Substrate Bias ◽  
Plasma Cvd ◽  
Substrate Bias Voltage ◽  
Carbon Thin Films
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