Emissive probe measurements of electron energy distribution function in radio-frequency plasma
1992 ◽
Vol 10
(4)
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pp. 1207-1211
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2012 ◽
Vol 21
(2)
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pp. 025004
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1994 ◽
Vol 3
(4)
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pp. 528-538
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1977 ◽
Vol 27
(9)
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pp. 1027-1033
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