Spectroscopic and energetic characterization of capillary discharge plasmas devoted to EUV production for new lithography generation
2016 ◽
Vol 87
(9)
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pp. 093302
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2018 ◽
Vol 124
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pp. 90-97
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2020 ◽
Vol 1596
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pp. 012063
2004 ◽
Vol 80
(9)
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pp. 723-724
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