Investigation of long-pulse plasma immersion ion implantation
2014 ◽
Vol 880
◽
pp. 155-160
◽
Keyword(s):
1997 ◽
Vol 93
(2-3)
◽
pp. 238-241
◽
Keyword(s):
2010 ◽
Vol 12
(5)
◽
pp. B163-B169
◽
2014 ◽
Vol 310
◽
pp. 120-125
◽
Keyword(s):
Keyword(s):
2002 ◽
Vol 149
(2-3)
◽
pp. 114-118
◽
Keyword(s):
2020 ◽
Vol 1695
◽
pp. 012009