Electron energy loss spectrum application for failure mechanism investigation in semiconductor failure analysis

Author(s):  
Kun Lin ◽  
Chia Hung Chao ◽  
Tsui-Hua Huang ◽  
Hsiu-Mei Fan ◽  
Shey-Shi Lu
1979 ◽  
Vol 83 (1) ◽  
pp. 131-140 ◽  
Author(s):  
P. Bayat-Mokhtari ◽  
S.M. Barlow ◽  
T.E. Gallon

2004 ◽  
Vol 394 (4-6) ◽  
pp. 280-282
Author(s):  
F. Xu ◽  
G. Manicò ◽  
A. Bonanno ◽  
P. Barone ◽  
P. Riccardi ◽  
...  

2013 ◽  
Vol 114 (5) ◽  
pp. 054906 ◽  
Author(s):  
Shuji Nishida ◽  
Shunsuke Kobayashi ◽  
Akihito Kumamoto ◽  
Hidekazu Ikeno ◽  
Teruyasu Mizoguchi ◽  
...  

1974 ◽  
Vol 24 (3) ◽  
pp. 428-430 ◽  
Author(s):  
R.J. Celotta ◽  
S.R. Mielczarek ◽  
C.E. Kuyatt

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