Application of Auger electron spectroscopy (AES), TEM electron energy loss spectrum (EELS) in failure analysis on poly grooves issue in wafer fabrication

2004 IEEE International Conference on Semiconductor Electronics ◽

10.1109/smelec.2004.1620894 ◽

2004 ◽

Author(s):

Phong Ooi Lin ◽

Ang Ghim Boon ◽

Chua Kok Keng ◽

Oh Chong Khiam ◽

Lo Keng Foo

Keyword(s):

Energy Loss ◽

Failure Analysis ◽

Auger Electron Spectroscopy ◽

Electron Energy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Electron Energy Loss Spectrum ◽

Wafer Fabrication ◽

Electron Energy Loss

Download Full-text

Oxidation study by Auger electron spectroscopy and electron energy-loss spectroscopy of GaSb(001) surfaces grown by molecular-beam epitaxy

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.584830 ◽

1990 ◽

Vol 8 (1) ◽

pp. 68 ◽

Author(s):

C. Raisin

Keyword(s):

Molecular Beam Epitaxy ◽

Energy Loss ◽

Auger Electron Spectroscopy ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Molecular Beam ◽

Oxidation Study ◽

Electron Energy Loss

Download Full-text

A Technique for Performing Angle-Resolved Auger Electron Spectroscopy (ARAES) and Angle-Resolved Electron Energy Loss Spectroscopy (ARELS)

Springer Series in Surface Sciences - Auger Spectroscopy and Electronic Structure ◽

10.1007/978-3-642-75066-3_31 ◽

1989 ◽

pp. 251-256

Author(s):

G. B. Hoflund

Keyword(s):

Energy Loss ◽

Auger Electron Spectroscopy ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Electron Energy Loss

Download Full-text

Auger electron spectroscopy, x‐ray photoelectron spectroscopy, and electron energy‐loss spectroscopy studies of MoSi2

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.577917 ◽

1992 ◽

Vol 10 (4) ◽

pp. 2822-2825 ◽

Author(s):

R. S. Rastogi ◽

V. D. Vankar ◽

K. L. Chopra

Keyword(s):

Energy Loss ◽

Auger Electron Spectroscopy ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

X Ray ◽

Spectroscopy Studies ◽

Electron Energy Loss

Download Full-text

An Auger electron spectroscopy/electron energy‐loss spectroscopy study on the oxidation of WSi2 thin film

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.574620 ◽

1987 ◽

Vol 5 (4) ◽

pp. 1456-1458 ◽

Author(s):

Jian‐Wei He ◽

Preben J. Mo/ller ◽

Jiann‐Ruey Chen

Keyword(s):

Thin Film ◽

Energy Loss ◽

Auger Electron Spectroscopy ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Spectroscopy Study ◽

Electron Energy Loss

Download Full-text

Auger electron spectroscopy and electron energy-loss spectroscopy study of ferromagnetic carbon

Chemical Physics Letters ◽

10.1016/0009-2614(92)85253-7 ◽

1992 ◽

Vol 189 (6) ◽

pp. 577-580 ◽

Author(s):

Yu.M. Shulg'a ◽

A.I. Boldyrev ◽

A.A. Ovchinnikov

Keyword(s):

Energy Loss ◽

Auger Electron Spectroscopy ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Spectroscopy Study ◽

Electron Energy Loss

Download Full-text

Ion induced chemical bonding of carbon with Ta as studied by Auger electron spectroscopy and slow electron energy loss spectroscopy

Applied Physics Letters ◽

10.1063/1.105746 ◽

1991 ◽

Vol 59 (25) ◽

pp. 3247-3248 ◽

Author(s):

J. K. N. Sharma ◽

Santanu Bera ◽

B. R. Chakraborty

Keyword(s):

Energy Loss ◽

Auger Electron Spectroscopy ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Chemical Bonding ◽

Electron Spectroscopy ◽

Auger Electron ◽

Slow Electron ◽

Electron Energy Loss

Download Full-text

A comparison between electron energy loss spectroscopy and Auger electron spectroscopy sputtering depth profiles of Ta2O5/Ta

Thin Solid Films ◽

10.1016/0040-6090(84)90294-3 ◽

1984 ◽

Vol 120 (3) ◽

pp. 185-189 ◽

Author(s):

J.M. Sanz ◽

S. Hofmann

Keyword(s):

Energy Loss ◽

Auger Electron Spectroscopy ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Depth Profiles ◽

Electron Energy Loss

Download Full-text

Auger electron spectroscopy (AES) and electron energy loss spectroscopy (EELS) studies of GaP and Si surfaces

Vacuum ◽

10.1016/s0042-207x(01)00481-x ◽

2002 ◽

Vol 65 (2) ◽

pp. 193-206 ◽

Author(s):

E. Paparazzo ◽

L. Moretto ◽

Massimo Brolatti

Keyword(s):

Energy Loss ◽

Auger Electron Spectroscopy ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Electron Energy Loss

Download Full-text

Tm Studied by Electron Energy-Loss Spectroscopy and Auger Electron Spectroscopy

Physica Scripta ◽

10.1088/0031-8949/1983/t4/038 ◽

1983 ◽

Vol T4 ◽

pp. 169-172 ◽

Author(s):

J Onsgaard ◽

I Chorkendorff ◽

O Sørensen

Keyword(s):

Energy Loss ◽

Auger Electron Spectroscopy ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Electron Energy Loss

Download Full-text

Onset of oxidation of Al(111) at low temperatures: A study by electron-energy-loss spectroscopy and Auger electron spectroscopy

Physical Review B ◽

10.1103/physrevb.33.1436 ◽

1986 ◽

Vol 33 (2) ◽

pp. 1436-1439 ◽

Author(s):

J. G. Chen ◽

J. E. Crowell ◽

J. T. Yates

Keyword(s):

Energy Loss ◽

Auger Electron Spectroscopy ◽

Electron Energy ◽

Electron Energy Loss Spectroscopy ◽

Low Temperatures ◽

Electron Spectroscopy ◽

Auger Electron ◽

Electron Energy Loss

Download Full-text