Micro tensile-test of silicon film having different crystallographic orientations

2002 ◽  
Author(s):  
K. Sato ◽  
M. Shikida ◽  
T. Yoshioka ◽  
T. Ando ◽  
T. Kawabata
Keyword(s):  
Tensile Test ◽  
Silicon Film ◽  
Crystallographic Orientations

Tensile testing of silicon film having different crystallographic orientations carried out on a silicon chip

1998 ◽  
Vol 70 (1-2) ◽  
pp. 148-152 ◽  
Author(s):  
Kazuo Sato ◽  
Tetsuo Yoshioka ◽  
Taeko Ando ◽  
Mitsuhiro Shikida ◽  
Tatsuo Kawabata
Keyword(s):  
Tensile Testing ◽  
Silicon Film ◽  
Crystallographic Orientations

Measurement for fracture toughness of single crystal silicon film with tensile test

2005 ◽  
Vol 119 (1) ◽  
pp. 229-235 ◽  
Author(s):  
Xueping Li ◽  
Takashi Kasai ◽  
Shigeki Nakao ◽  
Hiroshi Tanaka ◽  
Taeko Ando ◽  
...  
Keyword(s):  
Fracture Toughness ◽  
Tensile Test ◽  
Single Crystal ◽  
Silicon Film ◽  
Single Crystal Silicon ◽  
Crystal Silicon

Tensile test of sintered Si3N4 and the influence of process defects such as pores on fracture strength.

1989 ◽  
Vol 38 (424) ◽  
pp. 32-38 ◽  
Author(s):  
Hidehiro KISHIMOTO ◽  
Akira UENO ◽  
Hiroshi KAWAMOTO ◽  
Sachio URA
Keyword(s):  
Tensile Test ◽  
Fracture Strength
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