WO3-based Hydrogen Gas Sensors Using Stacked Thin Films with Interspace

In this work, we investigate the influence of position of electrodes on the sensitivity of hydrogen gas sensors based on TiO2 thin films. We have prepared two types of sensors with platinum comb-like electrodes deposited on top and under the TiO2 layer. Response of these sensors to hydrogen gas in the concentration range of 0 10 000 ppm at temperature of 350 °C has been studied. The sensors with electrodes placed under the TiO2 layer showed two orders of magnitude lower sensitivity for 10 000 ppm compared to sensors with electrodes on top of the layer, but it was considerably increased when thickness of the TiO2 layer was lowered. This gives a possibility to improve the sensitivity of gas sensors in which the electrodes must be placed below the sensing layer for their protection from harsh environment.

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Cover Picture: Highly Mobile Palladium Thin Films on an Elastomeric Substrate: Nanogap-Based Hydrogen Gas Sensors (Angew. Chem. Int. Ed. 23/2011)

Angewandte Chemie International Edition ◽

10.1002/anie.201102532 ◽

2011 ◽

Vol 50 (23) ◽

pp. 5227-5227

Author(s):

Junmin Lee ◽

Wooyoung Shim ◽

Eunyeong Lee ◽

Jin-Seo Noh ◽

Wooyoung Lee

Keyword(s):

Thin Films ◽

Gas Sensors ◽

Hydrogen Gas ◽

Hydrogen Gas Sensors

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Highly Mobile Palladium Thin Films on an Elastomeric Substrate: Nanogap-Based Hydrogen Gas Sensors

Angewandte Chemie International Edition ◽

10.1002/anie.201100054 ◽

2011 ◽

Vol 50 (23) ◽

pp. 5301-5305 ◽

Cited By ~ 88

Author(s):

Junmin Lee ◽

Wooyoung Shim ◽

Eunyeong Lee ◽

Jin-Seo Noh ◽

Wooyoung Lee

Keyword(s):

Thin Films ◽

Gas Sensors ◽

Hydrogen Gas ◽

Hydrogen Gas Sensors

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Microstructural Characterisation of RF Magnetron Sputtered ZnO Thin Films on SiC

Solid State Phenomena ◽

10.4028/www.scientific.net/ssp.99-100.123 ◽

2004 ◽

Vol 99-100 ◽

pp. 123-126 ◽

Cited By ~ 1

Author(s):

A. Trinchi ◽

W. Wlodarski ◽

Sandro Santucci ◽

D. Di Claudio ◽

Maurizio Passacantando ◽

...

Keyword(s):

Thin Films ◽

Gas Sensors ◽

Annealing Temperature ◽

Microstructural Characterization ◽

Hydrogen Gas ◽

Zno Thin Films ◽

Saw Devices ◽

Hydrogen Gas Sensors ◽

Microstructural Characterisation

The microstructural characterization of r.f. magnetron sputtered ZnO thin films deposited on 6H-SiC is presented with a comprehensive investigation of their properties as a function of annealing temperature and film thickness. These structures, with some modifications, are utilised as Schottky diode hydrogen gas sensors and Surface Acoustic Wave (SAW) devices.

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