Microstructural Characterisation of RF Magnetron Sputtered ZnO Thin Films on SiC

2004 ◽  
Vol 99-100 ◽  
pp. 123-126 ◽  
Author(s):  
A. Trinchi ◽  
W. Wlodarski ◽  
Sandro Santucci ◽  
D. Di Claudio ◽  
Maurizio Passacantando ◽  
...  
Keyword(s):  
Thin Films ◽  
Gas Sensors ◽  
Annealing Temperature ◽  
Microstructural Characterization ◽  
Hydrogen Gas ◽  
Zno Thin Films ◽  
Saw Devices ◽  
Hydrogen Gas Sensors ◽  
Microstructural Characterisation

The microstructural characterization of r.f. magnetron sputtered ZnO thin films deposited on 6H-SiC is presented with a comprehensive investigation of their properties as a function of annealing temperature and film thickness. These structures, with some modifications, are utilised as Schottky diode hydrogen gas sensors and Surface Acoustic Wave (SAW) devices.

Hydrogen Gas Sensors Using Anodically Prepared and Surface Modified Nanoporous ZnO Thin Films

2008 ◽  
Vol 6 (5) ◽  
pp. 699-704 ◽  
Author(s):  
P. K. Basu ◽  
S. K. Jana ◽  
M. K. Mitra ◽  
H. Saha ◽  
S. Basu
Keyword(s):  
Thin Films ◽  
Gas Sensors ◽  
Hydrogen Gas ◽  
Zno Thin Films ◽  
Hydrogen Gas Sensors ◽  
Surface Modified

Elaboration and Characterization of Mg-Doped ZnO Thin Films by Thermal Evaporation: Annealing Temperature Effect

2021 ◽  
Author(s):  
Fouaz Lekoui ◽  
Salim Hassani ◽  
Mohammed Ouchabane ◽  
Hocine Akkari ◽  
Driss Dergham ◽  
...  
Keyword(s):  
Thin Films ◽  
Temperature Effect ◽  
Annealing Temperature ◽  
Thermal Evaporation ◽  
Zno Thin Films ◽  
Doped Zno ◽  
Mg Doped

Characterization of Ga2O3 based MRISiC hydrogen gas sensors

2004 ◽  
Vol 103 (1-2) ◽  
pp. 129-135 ◽  
Author(s):  
A. Trinchi ◽  
S. Kaciulis ◽  
L. Pandolfi ◽  
M.K. Ghantasala ◽  
Y.X. Li ◽  
...  
Keyword(s):  
Gas Sensors ◽  
Hydrogen Gas ◽  
Hydrogen Gas Sensors

Hydrogen gas sensors based on nanocrystalline TiO2 thin films

Open Physics ◽  
2011 ◽  
Vol 9 (5) ◽  
Author(s):  
Azhar Haidry ◽  
Peter Schlosser ◽  
Pavol Durina ◽  
Marian Mikula ◽  
Milan Tomasek ◽  
...  
Keyword(s):  
Thin Films ◽  
Annealing Temperature ◽  
Gas Sensing ◽  
Hydrogen Gas ◽  
Tio2 Thin Films ◽  
Nanocrystalline Tio2 ◽  
Sensing Properties ◽  
Gas Sensing Properties ◽  
Hydrogen Gas Sensors ◽  
Titanium Dioxide Thin Films

AbstractTitanium dioxide thin films are extensively studied for applications in solid state gas sensor devices. Their gas sensing properties are strongly dependent on deposition technique, annealing temperature, film thickness and consequent properties like crystalline structure, grain size or amount of defects and impurities. In this work we report the gas sensing properties of TiO2 thin films prepared by reactive magnetron sputtering technique and subsequently annealed at temperatures 600°C and 900°C. The films were exposed to different concentrations of H2 gas up to 10 000 ppm. Their sensitivity to gas at various operating temperatures, ranging from 250°C to 450°C, was obtained by measuring their resistance.

Sign in / Sign up

Export Citation Format

Share Document