AbstractFluorinated and photo-imageable precursors are synthesized through a Barbier-Grignard reaction for 1550-nm window. The precursors are used for the sol-gel process of integrated optic components for silica-on-silicon technology. Material compositions and process parameters are optimized to achieve internal absorptions >0.1 dB/cm and propagation losses of about 0.5 dB/cm at 1550 nm. Compact 1×16 Beam splitters are designed and fabricated which exhibit >0.3 dB power uniformity, >0.1 dB PDL and 1.5 dB coupling loss. By hybrid integration of the passive splitters and in-house fiber amplifiers, amplifying splitters are demonstrated at various signal intensities.