Surface flashover of oil-immersed dielectric materials in uniform and non-uniform fields

One of the most important diagnostic problems multilayer dielectric materials and coatings is the development of methods for quantitative interpretation of the checkout results their electrophysical and geometric parameters. The results of a study of the potential informativeness of the multi-frequency radio wave method of surface electromagnetic waves during reconstruction of the electrophysical and geometric parameters of multilayer dielectric coatings are presented. The simulation model is presented that makes it possible to evaluate of the accuracy of reconstruction of the electrophysical and geometric parameters of multilayer dielectric coatings. The model takes into account the values of the electrophysical and geometric parameters of the coating, the noise level in the measurement data and the measurement bandwidth. The results of simulation and experimental investigations of reconstruction of the structure of relative permittivitties and thicknesses of single-layer and double-layer dielectric coatings with different thicknesses, with different values of the standard deviation (RMS) of the noise level in the measured attenuation coefficients of the surface slow electromagnetic wave are presented. Coatings based on the following materials were investigated: polymethyl methacrylate, F-4D PTFE, RO3010. The accuracy of reconstruction of the electrophysical parameters of the layers decreases with an increase in the number of evaluated parameters and an increase in the noise level. The accuracy of the estimates of the electrophysical parameters of the layers also decreases with a decrease in their relative permittivity and thickness. The results of experimental studies confirm the adequacy of the developed simulation model. The presented model allows for a specific measuring complex that implements the multi-frequency radio wave method of surface electromagnetic waves, to quantify the potential possibilities for the accuracy of reconstruction of the electrophysical and geometric parameters of multilayer dielectric materials and coatings. Experimental investigations and simulation results of a multilayer dielectric coating demonstrated the theoretical capabilities gained relative error permittivity and thickness of the individual layers with relative error not greater than 10 %, with a measurement bandwidth of 1 GHz and RMS of noise level 0,003–0,004.

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Reconstruction of the structure electrophysical parameters of multilayer dielectric materials and coatings according to the frequency dependence of the attenuation coefficient of the field of surface electromagnetic wave

Izmeritel`naya Tekhnika ◽

10.32446/0368-1025it.2019-9-39-45 ◽

2019 ◽

pp. 39-45 ◽

Cited By ~ 2

Author(s):

A.I. Kaz'min ◽

P.A. Fedjunin

Keyword(s):

Electromagnetic Wave ◽

Frequency Dependence ◽

Attenuation Coefficient ◽

Dielectric Materials ◽

Surface Electromagnetic Wave ◽

Multilayer Dielectric ◽

Electrophysical Parameters

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Transient Charging Characteristics in Surface Flashover Development Process due to Explosive Electron Emission in Vacuum

IEEJ Transactions on Fundamentals and Materials ◽

10.1541/ieejfms.134.578 ◽

2014 ◽

Vol 134 (11) ◽

pp. 578-584 ◽

Cited By ~ 1

Author(s):

Yusuke Nakano ◽

Hiroki Kojima ◽

Kenji Tsuchiya ◽

Naoki Hayakawa

Keyword(s):

Electron Emission ◽

Development Process ◽

Surface Flashover ◽

Explosive Electron Emission

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Modification of Low ĸ Materials for ULSI Multilevel Interconnects by Ion Implantation

MRS Proceedings ◽

10.1557/proc-716-b7.19 ◽

2002 ◽

Vol 716 ◽

Author(s):

Alok Nandini ◽

U. Roy ◽

A. Mallikarjunan ◽

A. Kumar ◽

J. Fortin ◽

...

Keyword(s):

Dielectric Constant ◽

Ion Implantation ◽

Dielectric Materials ◽

Dramatic Improvement ◽

Force Microscopy ◽

Low Dielectric ◽

Quantitative Measurements ◽

Hardness Increase ◽

Xerogel Films ◽

Ion Species

AbstractThin films of low dielectric constant (κ) materials such as Xerogel (ĸ=1.76) and SilkTM (ĸ=2.65) were implanted with argon, neon, nitrogen, carbon and helium with 2 x 1015 cm -2 and 1 x 1016 cm -2 dose at energies varying from 50 to 150 keV at room temperature. In this work we discuss the improvement of hardness as well as elasticity of low ĸ dielectric materials by ion implantation. Ultrasonic Force Microscopy (UFM) [6] and Nano indentation technique [5] have been used for qualitative and quantitative measurements respectively. The hardness increased with increasing ion energy and dose of implantation. For a given energy and dose, the hardness improvement varied with ion species. Dramatic improvement of hardness is seen for multi-dose implantation. Among all the implanted ion species (Helium, Carbon, Nitrogen, Neon and Argon), Argon implantation resulted in 5x hardness increase in Xerogel films, sacrificing only a slight increase (∼ 15%) in dielectric constant.

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