Downscaling Metal—Oxide Thin-Film Transistors to Sub-50 nm in an Exquisite Film-Profile Engineering Approach

2017 ◽  
Vol 64 (3) ◽  
pp. 1069-1075 ◽  
Author(s):  
Rong-Jhe Lyu ◽  
Bo-Shiuan Shie ◽  
Horng-Chih Lin ◽  
Pei-Wen Li ◽  
Tiao-Yuan Huang
Keyword(s):  
Thin Film ◽  
Metal Oxide ◽  
Thin Film Transistors ◽  
Oxide Thin Film ◽  
Engineering Approach ◽  
Metal Oxide Thin Film ◽  
Film Profile

Inkjet-Printed Self-Aligned Short-Channel Metal-Oxide Thin-Film Transistors Based on Coffee Stripe Dewetting Method

2019 ◽  
Vol 40 (2) ◽  
pp. 228-231 ◽  
Author(s):  
Yuzhi Li ◽  
Linfeng Lan ◽  
Peixiong Gao ◽  
Penghui He ◽  
Xingqiang Dai ◽  
...  
Keyword(s):  
Thin Film ◽  
Metal Oxide ◽  
Thin Film Transistors ◽  
Oxide Thin Film ◽  
Short Channel ◽  
Metal Oxide Thin Film

Cyclical Annealing Technique To Enhance Reliability of Amorphous Metal Oxide Thin Film Transistors

2018 ◽  
Vol 10 (31) ◽  
pp. 25866-25870 ◽  
Author(s):  
Hong-Chih Chen ◽  
Ting-Chang Chang ◽  
Wei-Chih Lai ◽  
Guan-Fu Chen ◽  
Bo-Wei Chen ◽  
...  
Keyword(s):  
Thin Film ◽  
Metal Oxide ◽  
Thin Film Transistors ◽  
Amorphous Metal ◽  
Oxide Thin Film ◽  
Metal Oxide Thin Film ◽  
Amorphous Metal Oxide
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