A matched expansion MEMS probe card with low CTE LTCC substrate

Author(s):  
Seong-Hun Choe ◽  
Shuji Tanaka ◽  
Masayoshi Esashi
Keyword(s):  
2008 ◽  
Vol 23 (2) ◽  
pp. 182-187 ◽  
Author(s):  
Z. W. Zhong ◽  
P. Arulvanan ◽  
C. K. Goh

Author(s):  
Goran J. Radosavljević ◽  
Andrea M. Marić ◽  
Walter Smetana ◽  
Ljiljana D. Živanov
Keyword(s):  
Air Gap ◽  
Q Factor ◽  
High Q ◽  

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