A matched expansion MEMS probe card with low CTE LTCC substrate
2008 ◽
Vol 23
(2)
◽
pp. 182-187
◽
2012 ◽
Vol 9
(1)
◽
pp. 1-10
◽
2008 ◽
Vol 18
(7)
◽
pp. 075031
◽
2006 ◽
Vol 55
(3)
◽
pp. 989-994
◽
Keyword(s):