Radiation-Induced Defect Centers in Thermally Grown Oxide Films

1975 ◽  
Vol 22 (6) ◽  
pp. 2234-2239 ◽  
Author(s):  
C. L. Marquardt ◽  
G. H. Sigel
Keyword(s):  
Oxide Films ◽  
Thermally Grown Oxide ◽  
Defect Centers ◽  
Radiation Induced ◽  
Thermally Grown

ChemInform Abstract: CAPACITANCE STUDY OF THERMALLY GROWN OXIDE FILMS ON IRON

1980 ◽  
Vol 11 (20) ◽  
Author(s):  
K. S. YUN ◽  
S. M. WILHELM ◽  
S. KAPUSTA ◽  
N. HACKERMAN
Keyword(s):  
Oxide Films ◽  
Thermally Grown Oxide ◽  
Thermally Grown

Positron beam and RBS studies of thermally grown oxide films on stainless steel grade 304

2015 ◽  
Vol 333 ◽  
pp. 96-103 ◽  
Author(s):  
P. Horodek ◽  
K. Siemek ◽  
A.G. Kobets ◽  
M. Kulik ◽  
I.N. Meshkov
Keyword(s):  
Stainless Steel ◽  
Oxide Films ◽  
Positron Beam ◽  
Thermally Grown Oxide ◽  
Steel Grade ◽  
Thermally Grown

Capacitance Study of Thermally Grown Oxide Films on Iron

1980 ◽  
Vol 127 (1) ◽  
pp. 85-90 ◽  
Author(s):  
K. S. Yun ◽  
S. M. Wilhelm ◽  
S. Kapusta ◽  
N. Hackerman
Keyword(s):  
Oxide Films ◽  
Thermally Grown Oxide ◽  
Thermally Grown

Influence of oxidation time on semiconductive behaviour of thermally grown oxide films on AISI 304L

2006 ◽  
Vol 252 (12) ◽  
pp. 4209-4217 ◽  
Author(s):  
L. Hamadou ◽  
A. Kadri ◽  
D. Boughrara ◽  
N. Benbrahim ◽  
J.-P. Petit
Keyword(s):  
Oxide Films ◽  
Thermally Grown Oxide ◽  
Oxidation Time ◽  
Aisi 304L ◽  
Thermally Grown

A Nanoindentation Study of Thermally-Grown-Oxide Films on Silicon

2004 ◽  
Vol 841 ◽  
Author(s):  
Fatih Helvaci ◽  
Junghyun Cho
Keyword(s):  
Thin Films ◽  
Inverse Analysis ◽  
Silicon Oxide ◽  
Oxide Films ◽  
Thermally Grown Oxide ◽  
Si Substrate ◽  
Depth Sensing ◽  
Fundamental Understanding ◽  
Elastic Mismatch ◽  
Thermally Grown

ABSTRACTWe explore the effect of the substrate on mechanical behavior of thin films using a depth-sensing indentation. For this purpose, nanoindentation has been performed on thermally grown silicon oxide films on the silicon substrate. One primary goal of this study is to extract ‘film-only’ mechanical properties from the nanoindentation data by subtracting the substrate effect. It is also shown that elastic modulus of the film is more influenced by the substrate than hardness due to a larger elastic extension beyond a plastically deformed region, as well as a larger elastic mismatch between the SiO2 film and the Si substrate. Further, an inverse analysis of indentation data is proposed to estimate a thickness of thin films. Consequently, this study provides a fundamental understanding in mechanical phenomena of thin films occurring at nanoscales.

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