Ion acceleration in a radio frequency driven ferroelectric plasma source

2005 ◽  
Vol 33 (2) ◽  
pp. 876-881 ◽  
Author(s):  
S.D. Kovaleski
Keyword(s):  
Radio Frequency ◽  
Plasma Source ◽  
Ion Acceleration

Nitrogen doping of molecular beam epitaxially grown CdTe with a radio-frequency plasma source

1994 ◽  
Vol 138 (1-4) ◽  
pp. 443-447 ◽  
Author(s):  
K.A. Dhese ◽  
D.E. Ashenford ◽  
J.E. Nicholls ◽  
P. Devine ◽  
B. Lunn ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Nitrogen Doping ◽  
Molecular Beam ◽  
Plasma Source ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

CVD of hard DLC films in a radio frequency inductively coupled plasma source

2001 ◽  
Vol 390 (1-2) ◽  
pp. 98-103 ◽  
Author(s):  
S.J Yu ◽  
Z.F Ding ◽  
J Xu ◽  
J.L Zhang ◽  
T.C Ma
Keyword(s):  
Radio Frequency ◽  
Inductively Coupled Plasma ◽  
Plasma Source ◽  
Inductively Coupled

Structure of RF fields in a twin-chamber radio-frequency inductive plasma source placed in a weak external magnetic field

Vacuum ◽  
2020 ◽  
Vol 181 ◽  
pp. 109634
Author(s):  
A.K. Petrov ◽  
E.A. Kralkina ◽  
A.M. Nikonov ◽  
K.V. Vavilin ◽  
I.I. Zadiriev
Keyword(s):  
Magnetic Field ◽  
External Magnetic Field ◽  
Radio Frequency ◽  
Plasma Source
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