Comparisons of the Characteristic on the Mode Transition in an Inductively Coupled Discharge by Exciting Coil Change

IEEE Transactions on Plasma Science ◽

10.1109/tps.2017.2660496 ◽

2017 ◽

Vol 45 (3) ◽

pp. 338-345 ◽

Author(s):

Xiao Zhang ◽

Jin-Xiang Cao ◽

Yu Liu ◽

Yan-Peng Wang ◽

Peng-Cheng Yu ◽

...

Keyword(s):

Mode Transition ◽

Inductively Coupled ◽

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Evolution of Two-Dimensional Plasma Density on the E–H Heating-Mode Transition in Planar-Type Inductively Coupled Plasma

IEEE Transactions on Plasma Science ◽

10.1109/tps.2011.2135382 ◽

2011 ◽

Vol 39 (11) ◽

pp. 2536-2537 ◽

Author(s):

Hyo-Chang Lee ◽

Young-Cheol Kim ◽

Chin-Wook Chung

Keyword(s):

Plasma Density ◽

Inductively Coupled Plasma ◽

Mode Transition ◽

Two Dimensional ◽

Inductively Coupled ◽

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Time-resolved measurements of the E-to-H mode transition in electronegative pulse-modulated inductively coupled plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.2359736 ◽

2006 ◽

Vol 24 (6) ◽

pp. 2151-2158 ◽

Author(s):

Manabu Edamura ◽

Eric C. Benck ◽

Yicheng Wang

Keyword(s):

Mode Transition ◽

Inductively Coupled Plasmas ◽

Time Resolved ◽

Inductively Coupled ◽

Coupled Plasmas ◽

Time Resolved Measurements

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Evolution of two-dimensional plasma parameters in the plane of the wafer during the E- to H- and H- to E-mode transition in an inductively coupled plasma

Plasma Sources Science and Technology ◽

10.1088/1361-6595/aac241 ◽

2018 ◽

Vol 27 (5) ◽

pp. 055018 ◽

Author(s):

Il-Seo Park ◽

Kyung-Hyun Kim ◽

Tae-Woo Kim ◽

Kwan-Youg Kim ◽

Ho-Jun Moon ◽

...

Keyword(s):

Inductively Coupled Plasma ◽

Mode Transition ◽

Two Dimensional ◽

Plasma Parameters ◽

Inductively Coupled

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Mode Transition and Hysteresis in Inductively Coupled Plasma Sources

Plasma Science and Technology - Basic Fundamentals and Modern Applications ◽

10.5772/intechopen.76654 ◽

2019 ◽

Author(s):

Shu-Xia Zhao

Keyword(s):

Inductively Coupled Plasma ◽

Mode Transition ◽

Plasma Sources ◽

Inductively Coupled

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Temporal behaviour of the E to H mode transition in an inductively coupled argon discharge

Plasma Sources Science and Technology ◽

10.1088/0963-0252/15/3/011 ◽

2006 ◽

Vol 15 (3) ◽

pp. 378-383 ◽

Author(s):

P Kempkes ◽

S V Singh ◽

C Pargmann ◽

H Soltwisch

Keyword(s):

Mode Transition ◽

Temporal Behaviour ◽

Inductively Coupled ◽

Argon Discharge

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Electron energy distribution function close to the mode transition region in an inductively coupled gaseous electronics conference reference cell

Applied Physics Letters ◽

10.1063/1.2362599 ◽

2006 ◽

Vol 89 (16) ◽

pp. 161501 ◽

Author(s):

S. V. Singh ◽

P. Kempkes ◽

H. Soltwisch

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Transition Region ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Mode Transition ◽

Reference Cell ◽

Inductively Coupled ◽

Gaseous Electronics Conference

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E→H mode transition density and power in two types of inductively coupled plasma configuration

Physics of Plasmas ◽

10.1063/1.4886147 ◽

2014 ◽

Vol 21 (7) ◽

pp. 073502 ◽

Author(s):

Jian Wang ◽

Yin-chang Du ◽

Xiao Zhang ◽

Zhe Zheng ◽

Yu Liu ◽

...

Keyword(s):

Inductively Coupled Plasma ◽

Transition Density ◽

Mode Transition ◽

Inductively Coupled ◽

Plasma Configuration

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Spatiotemporal optical structure of plasmas in the E-to-H mode transition in an inductively coupled plasma in Ar

Plasma Sources Science and Technology ◽

10.1088/0963-0252/19/5/055007 ◽

2010 ◽

Vol 19 (5) ◽

pp. 055007 ◽

Author(s):

Satoshi Morishita ◽

Yuichiro Hayashi ◽

Toshiaki Makabe

Keyword(s):

Inductively Coupled Plasma ◽

Mode Transition ◽

Inductively Coupled ◽

Optical Structure

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Dynamics of E-H mode transition in high-pressure RF inductively coupled plasmas

IEEE Transactions on Plasma Science ◽

10.1109/tps.2005.845019 ◽

2005 ◽

Vol 33 (2) ◽

pp. 284-285 ◽

Author(s):

M.A. Razzak ◽

S. Takamura ◽

Y. Uesugi

Keyword(s):

High Pressure ◽

Mode Transition ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Kinetic modeling of E-to-H mode transition in inductively coupled hydrogen plasmas

Journal of Applied Physics ◽

10.1063/1.4953647 ◽

2016 ◽

Vol 119 (23) ◽

pp. 233302 ◽

Author(s):

K. Nishida ◽

S. Mattei ◽

S. Mochizuki ◽

J. Lettry ◽

A. Hatayama

Keyword(s):

Kinetic Modeling ◽

Mode Transition ◽

Inductively Coupled ◽

Hydrogen Plasmas

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