A 32 x 32 capacitive micromachined ultrasonic transducer array manufactured in standard CMOS

2012 ◽  
Vol 59 (7) ◽  
pp. 1521-1536 ◽  
Author(s):  
David F. Lemmerhirt ◽  
Xiaoyang Cheng ◽  
Robert D. White ◽  
Collin A. Rich ◽  
Man Zhang ◽  
...  
Keyword(s):  
Ultrasonic Transducer ◽  
Transducer Array ◽  
Capacitive Micromachined Ultrasonic Transducer ◽  
X 32

Design and Fabrication of a High-Power Air-Coupled Capacitive Micromachined Ultrasonic Transducer Array With Concentric Annular Cells

2017 ◽  
Vol 64 (11) ◽  
pp. 4636-4643 ◽  
Author(s):  
Shuai Na ◽  
Zhou Zheng ◽  
Albert I-Hsiang Chen ◽  
Lawrence L. P. Wong ◽  
Zhenhao Li ◽  
...  
Keyword(s):  
High Power ◽  
Ultrasonic Transducer ◽  
Transducer Array ◽  
Capacitive Micromachined Ultrasonic Transducer

Fabrication of a Curved Row–Column Addressed Capacitive Micromachined Ultrasonic Transducer Array

2016 ◽  
Vol 25 (4) ◽  
pp. 675-682 ◽  
Author(s):  
Albert I-Hsiang Chen ◽  
Lawrence L. P. Wong ◽  
Shuai Na ◽  
Zhenhao Li ◽  
Mirek Macecek ◽  
...  
Keyword(s):  
Ultrasonic Transducer ◽  
Transducer Array ◽  
Capacitive Micromachined Ultrasonic Transducer

Design and Characterization of Capacitive Micromachined Ultrasonic Transducer

2006 ◽  
Vol 321-323 ◽  
pp. 132-135
Author(s):  
Bong Young Ahn ◽  
Ki Bok Kim ◽  
Hae Won Park ◽  
Young Joo Kim ◽  
Yong Seok Kwak
Keyword(s):  
Sacrificial Layer ◽  
Ultrasonic Transducer ◽  
Medical Engineering ◽  
Single Element ◽  
Air Atmosphere ◽  
Engineering Society ◽  
Capacitive Micromachined Ultrasonic Transducer ◽  
X 32 ◽  
2D Array

As cMUTs (capacitive Micromachined Ultrasonic Transducer) offer numerous advantages over traditional transducers in terms of efficiency, bandwidth, and cost, they are expected to replace piezoelectric transducers in many applications. In particular, 2D-array cMUTs have aroused great interest in the medical engineering society because of their ability to materialize a true volumetric ultrasonic image. In this study, single element cMUTs with 32 x 32 and 64 x 64 cells were successfully fabricated. The diameter and thickness of the membrane are 35 and 1000 nm, respectively, with a sacrificial layer thickness of 600 nm. The electric characteristics of the fabricated cMUT were measured. Tests on the efficiencies of the cMUT in terms of wave generation and in terms of detection according to the bias and pulse voltage were performed in an air atmosphere.

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