Detection of strain minimization in Hf-based gate dielectrics by X-ray absorption and non-linear optical second harmonic generation spectroscopy
1995 ◽
Vol 5
(2)
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pp. 253-259
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Keyword(s):
1991 ◽
Vol 53
(6)
◽
pp. 552-556
◽
Keyword(s):
2000 ◽
Keyword(s):