Development of ZnO thin films for SAW devices by the ultrasonic spray pyrolysis technique

2002 ◽  
Author(s):  
Hagbong Kim ◽  
Youngjin Lee ◽  
Yongrae Roh ◽  
Jinyoung Jung ◽  
Manhyeong Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Spray Pyrolysis ◽  
Spray Pyrolysis Technique ◽  
Ultrasonic Spray Pyrolysis ◽  
Zno Thin Films ◽  
Ultrasonic Spray Pyrolysis Technique ◽  
Ultrasonic Spray ◽  
Saw Devices

Fe2O3 Thin Films Prepared by Ultrasonic Spray Pyrolysis

2010 ◽  
Vol 644 ◽  
pp. 105-108 ◽  
Author(s):  
M.A. García-Lobato ◽  
A. Hernández-V ◽  
H.M. Hdz-García ◽  
Arturo I. Martinez ◽  
M.I. Pech-Canul
Keyword(s):  
Thin Films ◽  
Spray Pyrolysis ◽  
Spray Pyrolysis Technique ◽  
Ultrasonic Spray Pyrolysis ◽  
Morphological Properties ◽  
Amorphous Thin Films ◽  
Glass Substrates ◽  
Ultrasonic Spray Pyrolysis Technique ◽  
Ultrasonic Spray ◽  
Iron Oxide Films

Fe2O3 thin films were obtained on glass substrates by the ultrasonic spray pyrolysis technique; additionally, a thermodynamic analysis on the Fe2O3 formation from different precursor salts was performed. In this work, the influence of the deposition temperature is related with the structural, optical, and morphological properties of the iron oxide films. The present results reveal that amorphous thin films are obtained at temperatures lower than 350° C, while polycrystalline films with the maghemite structure are formed at higher temperatures.

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