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Ultra-thin silicon dioxide leakage current and scaling limit
1992 Symposium on VLSI Technology Digest of Technical Papers
◽
10.1109/vlsit.1992.200622
◽
2003
◽
Cited By ~ 67
Author(s):
K.F. Schuegraf
◽
C.C. King
◽
C. Hu
Keyword(s):
Silicon Dioxide
◽
Leakage Current
◽
Scaling Limit
◽
Thin Silicon
Download Full-text
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Cited By
References
Influence of trapped charges on low-level leakage current in thin silicon dioxide films
2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443)
◽
10.1109/icsict.2001.982058
◽
2005
◽
Cited By ~ 1
Author(s):
T.P. Chen
◽
Y.L. Luo
Keyword(s):
Silicon Dioxide
◽
Leakage Current
◽
Low Level
◽
Silicon Dioxide Films
◽
Thin Silicon
Download Full-text
Leakage current conduction and reliability assessment of passivating thin silicon dioxide films on n-4H-SiC
10.1117/12.2238875
◽
2016
◽
Cited By ~ 2
Author(s):
Piyas Samanta
◽
Krishna C. Mandal
Keyword(s):
Silicon Dioxide
◽
Leakage Current
◽
Reliability Assessment
◽
Silicon Dioxide Films
◽
Current Conduction
◽
Thin Silicon
Download Full-text
A hot hole-induced low-level leakage current in thin silicon dioxide films
IEEE Transactions on Electron Devices
◽
10.1109/16.543028
◽
1996
◽
Vol 43
(11)
◽
pp. 1924-1929
◽
Cited By ~ 28
Author(s):
N. Matsukawa
◽
S. Yamada
◽
K. Amemiya
◽
H. Hazama
Keyword(s):
Silicon Dioxide
◽
Leakage Current
◽
Low Level
◽
Silicon Dioxide Films
◽
Thin Silicon
Download Full-text
A Hot Carrier Induced Low-Level Leakage Current in Thin Silicon Dioxide Films
33rd IEEE International Reliability Physics Symposium
◽
10.1109/irps.1995.363351
◽
1995
◽
Author(s):
N. Matsukawa
◽
S. Yamada
◽
K. Amemiya
◽
H. Hazama
Keyword(s):
Silicon Dioxide
◽
Leakage Current
◽
Hot Carrier
◽
Low Level
◽
Silicon Dioxide Films
◽
Thin Silicon
Download Full-text
Charging And Intrinsic-leakage Current Peaks In Thin Silicon-dioxide Films
Symposium on VLSI Technology
◽
10.1109/vlsit.1997.623741
◽
1997
◽
Cited By ~ 6
Author(s):
Yamada
◽
Yugami
◽
Ohkura
Keyword(s):
Silicon Dioxide
◽
Leakage Current
◽
Silicon Dioxide Films
◽
Thin Silicon
Download Full-text
Conduction mechanism and origin of stress‐induced leakage current in thin silicon dioxide films
Journal of Applied Physics
◽
10.1063/1.363655
◽
1996
◽
Vol 80
(11)
◽
pp. 6360-6369
◽
Cited By ~ 53
Author(s):
Mikihiro Kimura
◽
Tadahiro Ohmi
Keyword(s):
Silicon Dioxide
◽
Leakage Current
◽
Conduction Mechanism
◽
Silicon Dioxide Films
◽
Thin Silicon
◽
Stress Induced Leakage Current
Download Full-text
A Two-Step Tunneling Model for the Stress Induced Leakage Current in Thin Silicon Dioxide Films
10.7567/ssdm.1993.a-4-5
◽
1993
◽
Cited By ~ 1
Author(s):
Naoki Yasuda
◽
Nalin Patel
◽
Akira Toriumi
Keyword(s):
Silicon Dioxide
◽
Leakage Current
◽
Tunneling Model
◽
Silicon Dioxide Films
◽
Thin Silicon
◽
Stress Induced Leakage Current
Download Full-text
A hot carrier induced low-level leakage current in thin silicon dioxide films
33rd IEEE International Reliability Physics Symposium
◽
10.1109/relphy.1995.513670
◽
1995
◽
Cited By ~ 8
Author(s):
N. Matsukawa
◽
S. Yamada
◽
K. Amemiya
◽
H. Hazama
Keyword(s):
Silicon Dioxide
◽
Leakage Current
◽
Hot Carrier
◽
Low Level
◽
Silicon Dioxide Films
◽
Thin Silicon
Download Full-text
Measurements and Modelling of Thin Silicon Dioxide Films on Silicon
10.21236/ada207853
◽
1989
◽
Author(s):
A. Kalnitsky
◽
S. P. Tay
◽
J. P. Ellul
◽
J. W. Andrews
◽
E. A. Irene
◽
...
Keyword(s):
Silicon Dioxide
◽
Silicon Dioxide Films
◽
Thin Silicon
Download Full-text
Gas Permeation Study and Imperfection Detection of Thermally Grown and Deposited Thin Silicon Dioxide Films
Journal of The Electrochemical Society
◽
10.1149/1.2425375
◽
1962
◽
Vol 109
(3)
◽
pp. 221
◽
Cited By ~ 36
Author(s):
S. W. Ing
◽
R. E. Morrison
◽
J. E. Sandor
Keyword(s):
Silicon Dioxide
◽
Gas Permeation
◽
Silicon Dioxide Films
◽
Permeation Study
◽
Thin Silicon
◽
Thermally Grown
Download Full-text
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