Precision Positioning Control of Single-Axis Ultrasonic Actuating Stage by Using Neuro-Fuzzy Control Law
2010 ◽
Vol 23
(3)
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pp. 290-297
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Keyword(s):
2010 ◽
Vol 44-47
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pp. 321-325
Keyword(s):
2003 ◽
Vol 19
(2)
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pp. 283-295
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Keyword(s):
2006 ◽
Vol 13
(2-3)
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pp. 724-747
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2003 ◽
Vol 26
(3)
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pp. 262-266
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