P1.4 - Dense ceramic NTC thermistor films produced at room temperature by the novel aerosol deposition method (ADM) for temperature sensor applications
The study compares thick-film NTC thermistor devices, produced by the screen-printing (and firing) technique and by the Aerosol Deposition Method (ADM) at room temperature. The devices are compared with respect to film quality (optical, mechanical) and to the negative temperature coefficient of resistance (NTCR) parameters [Formula: see text] and [Formula: see text]. While the screen-printed films are porous, the Aerosol Deposited (AD) films are characterized by high tightness, mechanical stability, and a production at room temperature. The electrical analysis shows that the AD films reach the [Formula: see text]- and [Formula: see text]-values of bulk NTCRs from literature after a moderate tempering step below 400[Formula: see text]C in air. The screen-printed films show [Formula: see text]-values that are comparable to the values of bulk NTCRs from literature and [Formula: see text]-values that are significantly higher.
Freestanding BaTiO3 ceramics films were fabricated using the aerosol deposition (AD) method and the size effect of nanograined BaTiO3 ceramics was demonstrated. Dense BaTiO3 thick film fabricated by the AD method was crystallized and detached from substrate by an annealing treatment at 600 °C, and then the grain size was controlled by a reannealing treatment at various temperatures. As a result, freestanding BaTiO3 thick films with various grain sizes from 24 to 170 nm were successfully obtained. Polarization–electric field (P–E) measurement revealed that BaTiO3 ceramics with grain sizes of more than 58 nm showed ferroelectricity, whereas BaTiO3 ceramics with an average grain size of 24 nm showed paraelectricity at room temperature. Dielectric measurement indicated that the permittivity decreased with decreasing grain size in the range of 170 to 24 nm.
Aerosol deposition method (ADM) for shock-consolidation of fine ceramics powder to form dense and hard layers is reported. Submicron ceramic particles were accelerated by gas flow in the nozzle up to velocity of several hundred m/s. During interaction with substrate, these particles formed thick (10 ~ 100 µm), dense, uniform and hard ceramics layers. Depositions were fulfilled at room temperature. Every layer has polycrystalline structure with nano-meter order scale. The results of fabrications, microstructure, mechanical and electrical properties of oxides (α-Al2O3; Pb(Zr0.52,Ti0.48)O3 etc.) and non-oxides materials are presented.
The powder aerosol deposition method (PAD) is a vacuum-based spray coating technology. It allows for production of highly dense coatings at room temperature, especially of brittle-breaking materials. This yields new options for coating substrate materials that even melt at low temperatures. The film formation mechanism is called room temperature impact consolidation (RTIC). The occurrence of this mechanism is strongly linked to the gas jet used in the process. The velocity and direction of the particles in the gas jet forming between the nozzle orifice and the substrate are the main factors influencing the quality of the coating. This dependency aimed to be elaborated with a measurement setup and coating experiments and is shown in this work. We investigated the gas jet formation using a shadow optical imaging system. Regions of different gas density are visualized by this technique. Several parameter sets, in particular gas flow rates and chamber pressures, were investigated. In addition, coatings were produced on glass substrates with the same parameters. As a coating material, the superconducting ceramic-like magnesium diboride (MgB2) was chosen. A correlation between shadow images and thickness profiles of the coatings shows how the gas jet formation affects the uniformity of thickness. Shadow optical images provide valuable information on the flight direction of the particles and allow validation of simulation results.
AbstractAerosol deposition method (ADM) for shock-consolidation of fine ceramics powder to form dense and hard layers is reported. Submicron ceramic particles were accelerated by gas flow in the nozzle up to velocity of several hundred m/s. During interaction with substrate, these particles formed thick (10 ∼ 100 μm), dense, uniform and hard ceramics layers. Experiments were fulfilled at room temperature. The results of fabrications, microstructure and mechanical properties of oxides (Al2O3; (Ni,Zn)Fe2O3; Pb(Zr0.52,Ti0.48)O3 and non-oxide (AlN; MgB2) materials are presented. Every layer has polycrystalline structure with nano-meter order scale.