Fabrication of PZT MEMS energy harvester based on silicon and stainless-steel substrates utilizing an aerosol deposition method

2013 ◽  
Vol 23 (12) ◽  
pp. 125028 ◽  
Author(s):  
Shun-Chiu Lin ◽  
Wen-Jong Wu
Keyword(s):  
Stainless Steel ◽  
Energy Harvester ◽  
Aerosol Deposition ◽  
Deposition Method ◽  
Aerosol Deposition Method ◽  
Steel Substrates

scholarly journals Microstructures and Magnetic Properties of Sm-Fe-N Thick Films Produced by the Aerosol Deposition Method

2004 ◽  
Vol 45 (2) ◽  
pp. 369-372 ◽  
Author(s):  
Tomohito Maki ◽  
Satoshi Sugimoto ◽  
Toshio Kagotani ◽  
Koichiro Inomata ◽  
Jun Akedo
Keyword(s):  
Magnetic Properties ◽  
Thick Films ◽  
Aerosol Deposition ◽  
Deposition Method ◽  
Aerosol Deposition Method
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