Direct Simulation Monte Carlo Solution of Subsonic Flow Through Micro/Nanoscale Channels

2009 ◽  
Vol 131 (9) ◽  
Author(s):  
Ehsan Roohi ◽  
Masoud Darbandi ◽  
Vahid Mirjalili

We use a direct simulation Monte Carlo (DSMC) method to simulate gas heating/cooling and choked subsonic flows in micro/nanoscale channels subject to either constant wall temperature or constant/variable heat flux boundary conditions. We show the effects of applying various boundary conditions on the mass flow rate and the flow parameters. We also show that it is necessary to add a buffer zone at the end of the channel if we wish to simulate more realistic conditions at the channel outlet. We also discuss why applying equilibrium-based Maxwellian distribution on molecules coming from the channel outlet, where the flow is nonequilibrium, will not disturb the DSMC solution. The current velocity, pressure, and mass flow rate results are compared with different analytical solutions of the Navier–Stokes equations. Although there are good agreements between the DSMC results and the analytical solutions in low compressible flow, the analytical solutions yield incorrect velocity and mass flow rate values in short micro/nanochannel flows with high compressibility and/or choked flow conditions.

1998 ◽  
Vol 120 (2) ◽  
pp. 296-302 ◽  
Author(s):  
Masato Ikegawa ◽  
Jun’ichi Kobayashi ◽  
Morihisa Maruko

As integrated circuits are advancing toward smaller device features, step-coverage in submicron trenches and holes in thin film deposition are becoming of concern. Deposition consists of gas flow in the vapor phase and film growth in the solid phase. A deposition profile simulator using the direct simulation Monte Carlo method has been developed to investigate deposition profile characteristics on small trenches which have nearly the same dimension as the mean free path of molecules. This simulator can be applied to several deposition processes such as sputter deposition, and atmospheric- or low-pressure chemical vapor deposition. In the case of low-pressure processes such as sputter deposition, upstream boundary conditions of the trenches can be calculated by means of rarefied gas flow analysis in the reactor. The effects of upstream boundary conditions, molecular collisions, sticking coefficients, and surface migration on deposition profiles in the trenches were clarified.


1999 ◽  
Author(s):  
Ozgur Aktas ◽  
N. R. Aluru ◽  
Umberto Ravaioli

Abstract Direct Simulation Monte Carlo (DSMC) analysis of micro-filter elements for collection of airborne particles is considered in this paper. Three filter elements with different dimensions were simulated. Boundary conditions were chosen to simulate an array of filters. Our results indicate that, as the filter gets smaller, the slip flow will be critical in determining flow characteristics. The change in the flow rate and the characteristics of the flow in different dimensions are investigated.


Author(s):  
Sauro Succi

This chapter provides a bird’s eye view of the main numerical particle methods used in the kinetic theory of fluids, the main purpose being of locating Lattice Boltzmann in the broader context of computational kinetic theory. The leading numerical methods for dense and rarified fluids are Molecular Dynamics (MD) and Direct Simulation Monte Carlo (DSMC), respectively. These methods date of the mid 50s and 60s, respectively, and, ever since, they have undergone a series of impressive developments and refinements which have turned them in major tools of investigation, discovery and design. However, they are both very demanding on computational grounds, which motivates a ceaseless demand for new and improved variants aimed at enhancing their computational efficiency without losing physical fidelity and vice versa, enhance their physical fidelity without compromising computational viability.


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