Modeling a Three-Axis Thermal MEMS Gyroscope
Keyword(s):
This paper reports modeling of a three-axis thermal Micro-Electro-Mechanical System, MEMS, gyroscope through the use of the COMSOL Multiphysics software package. Being very small and having no movable parts makes the thermal MEMS gyroscope very reliable. Previously designed Thermal MEMS gyroscopes have the capability of detecting single-axis rotation. A three-dimensional finite-element model of the device has been developed to investigate three-axis rotation detection possibilities. The effect of gravity has been also investigated and we show techniques for suppressing this interference.
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