A Variable-Gain Discrete Sliding Mode Control Strategy With PID-Type Sliding Surface for an Ultra-Precision Wafer Stage

2016 ◽  
Author(s):  
Min Li ◽  
Yu Zhu ◽  
Kaiming Yang ◽  
Chuxiong Hu ◽  
Haihua Mu
Keyword(s):  
Sliding Mode Control ◽  
Sliding Mode ◽  
Frequency Noise ◽  
Main Concern ◽  
Sliding Surface ◽  
External Disturbances ◽  
Variable Gain ◽  
Mode Control ◽  
Ultra Precision ◽  
Discrete Sliding Mode Control

The ultra-precision wafer stage is an important mechatronic unit in a wafer scanner for manufacturing integrated circuits while its motion control is still the main concern. To overcome the performance-limiting trade-offs of fixed-gain discrete sliding mode control (DSMC), a novel variable-gain DSMC strategy with PID-type sliding surface is proposed for an ultra-precision wafer stage. Specially, PID-type sliding surface is employed to avoid the steady-state error induced by external disturbances. Via the exponential reaching law approach, DSMC with PID-type sliding surface is synthesized. Variable-gain control methodology is newly introduced into DSMC, and the control gain varies with the trajectory phase that the wafer stage is in and the tracking error magnitude. Performance assessment on a developed wafer stage validates that with nano-scale tracking accuracy the proposed strategy not only improves the low-frequency tracking ability without the amplification of high-frequency noise, but also possesses the excellent robustness to external disturbances.

scholarly journals New Time-Varying Sliding Surface for Switching Type Quasi-Sliding Mode Control

Energies ◽  
2021 ◽  
Vol 14 (13) ◽  
pp. 3811
Author(s):  
Katarzyna Adamiak ◽  
Andrzej Bartoszewicz
Keyword(s):  
Sliding Mode Control ◽  
Continuous Time ◽  
Sliding Mode ◽  
Representative Point ◽  
Time Varying ◽  
Sliding Surface ◽  
External Disturbances ◽  
Mode Control ◽  
Switching Type ◽  
Time Systems

This study considers the problem of energetical efficiency in switching type sliding mode control of discrete-time systems. The aim of this work is to reduce the quasi-sliding mode band-width and, as follows, the necessary control input, through an application of a new type of time-varying sliding hyperplane in quasi-sliding mode control of sampled time systems. Although time-varying sliding hyperplanes are well known to provide insensitivity to matched external disturbances and uncertainties of the model in the whole range of motion for continuous-time systems, their application in the discrete-time case has never been studied in detail. Therefore, this paper proposes a sliding surface, which crosses the system’s representative point at the initial step and then shifts in the state space according to the pre-generated demand profile of the sliding variable. Next, a controller for a real perturbed plant is designed so that it drives the system’s representative point to its reference position on the sliding plane in each step. Therefore, the impact of external disturbances on the system’s trajectory is minimized, which leads to a reduction of the necessary control effort. Moreover, thanks to a new reaching law applied in the reference profile generator, the sliding surface shift in each step is strictly limited and a switching type of motion occurs. Finally, under the assumption of boundedness and smoothness of continuous-time disturbance, a compensation scheme is added. It is proved that this control strategy reduces the quasi-sliding mode band-width from O(T) to O(T3) order from the very beginning of the regulation process. Moreover, it is shown that the maximum state variable errors become of O(T3) order as well. These achievements directly reduce the energy consumption in the closed-loop system, which is nowadays one of the crucial factors in control engineering.

scholarly journals Adaptive Moving Sliding Mode Control for SISO Systems: Application to an Electropneumatic System

2016 ◽  
Vol 2016 ◽  
pp. 1-10 ◽  
Author(s):  
Assil Ayadi ◽  
Soufien Hajji ◽  
Mohamed Smaoui ◽  
Abdessattar Chaari
Keyword(s):  
Sliding Mode Control ◽  
Sliding Mode ◽  
Sliding Surface ◽  
External Disturbances ◽  
Single Input Single Output ◽  
Mode Control ◽  
Single Output ◽  
Single Input ◽  
Electropneumatic System ◽  
Siso Systems

This paper aims to propose and develop an adaptive moving sliding mode controller (AMSMC) that can be applied for nonlinear single-input single-output (SISO) systems with external disturbances. The main contribution of this framework consists to overcome the chattering phenomenon problem. The discontinuous term of the classic sliding mode control is replaced by an adaptive term. Moreover, a moving sliding surface is proposed to have better tracking and to guarantee robustness to the external disturbances. The parameters of the sliding surface and the adaptive law are deduced based on Lyapunov stability analysis. An experimental application of electropneumatic system is treated to validate the theoretical results.

Discrete sliding mode control with forgetting dynamic sliding surface

Mechatronics ◽  
2004 ◽  
Vol 14 (7) ◽  
pp. 737-755 ◽  
Author(s):  
Wen-Chun Yu ◽  
Gou-Jen Wang ◽  
Chun-Chin Chang
Keyword(s):  
Sliding Mode Control ◽  
Sliding Mode ◽  
Sliding Surface ◽  
Mode Control ◽  
Discrete Sliding Mode Control

Hybrid robust discrete sliding mode control for generalized continuous chaotic systems subject to external disturbances

2018 ◽  
Vol 29 ◽  
pp. 74-84 ◽  
Author(s):  
Jason Sheng-Hong Tsai ◽  
Jiunn-Shiou Fang ◽  
Jun-Juh Yan ◽  
Ming-Cheng Dai ◽  
Shu-Mei Guo ◽  
...  
Keyword(s):  
Sliding Mode Control ◽  
Chaotic Systems ◽  
Sliding Mode ◽  
External Disturbances ◽  
Mode Control ◽  
Discrete Sliding Mode Control

Vibration Suppression of Flexible Parallel Manipulator Based on Sliding Mode Control with Reaching Law

2012 ◽  
Vol 160 ◽  
pp. 30-34 ◽  
Author(s):  
Jun Feng Hu ◽  
Xiang Fu Cui ◽  
Pei Li
Keyword(s):  
Sliding Mode Control ◽  
High Speed ◽  
Sliding Mode ◽  
Damping Ratio ◽  
Modal Testing ◽  
Flexible Manipulator ◽  
External Disturbances ◽  
Reaching Law ◽  
Mode Control ◽  
Discrete Sliding Mode Control

A discrete sliding mode control based on reaching law is investigated to suppress vibration of high-speed flexible manipulator. The finite element method and experimental modal test is applied to obtain the dynamic model of the system. Due to the influence from uncertain external disturbances and measurement noise, and uncertain parameters, sliding mode control has invariance of the sliding mode. The discrete sliding mode control approach with reaching law is applied to design the vibration controller which enables the system to be zero state as the system states are away from the equilibrium one due to external disturbances. The discrete Kalman filtering technique is employed to construct state estimator because the state variables cannot be directly measured. The first three natural frequencies and damping ratio are obtained by using experimental modal testing. The experimental control system is constructed and experimental validation is carried out using dSPACE real-time simulation system and MATLAB/Simulink. The experimental results showed that the proposed controller can effectively suppress the vibration response of the flexible manipulator.

Discrete Time Sliding Mode Control Scheme for Nonlinear Systems With Bounded Uncertainties

2018 ◽  
Vol 7 (2) ◽  
pp. 15-33 ◽  
Author(s):  
Jalel Ghabi ◽  
Ahmed Rhif ◽  
Sundarapandian Vaidyanathan
Keyword(s):  
Sliding Mode Control ◽  
Discrete Time ◽  
Sliding Mode ◽  
System Stability ◽  
Switching Function ◽  
External Disturbances ◽  
Mode Control ◽  
Control Scheme ◽  
Control Methodology ◽  
Discrete Sliding Mode Control

This article introduces a sliding mode controller to stabilize a discrete-time nonlinear system in the presence of uncertainties and external disturbances. The proposed controller is derived to guarantee the existence of a quasi-sliding mode, taking into account the upper bound of uncertainties. With this method, a recursive switching function is used, which allows for recovering lost invariance and robustness properties of a discrete sliding mode control. As for the system stability, it is found that the system is stabilized and finally restricted to a known region. This control scheme ensures robustness against parametric uncertainties and external disturbances as well as the elimination of chattering. In this article, after a detailed formalization of the proposed control design, a numerical example for an inverted pendulum is considered, proving the effectiveness of the control methodology.

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