Fabrication of Two-Dimensional Photonic Crystals on N-Type Silicon Substrate Using Holographic and Wet Etching Techniques

2007 ◽  
Author(s):  
Han Lin ◽  
Shou Liu ◽  
Xiangsu Zhang
Keyword(s):  
Porous Silicon ◽  
Photonic Crystals ◽  
Silicon Substrate ◽  
Lattice Structure ◽  
Hexagonal Lattice ◽  
Cost Effective ◽  
Wet Etching ◽  
Etching Time ◽  
Two Dimensional ◽  
Photoresist Mask

Technique of fabricating two-dimensional (2D) photonic crystals (PCs) in silicon wafers using the combination of holographic lithography and wet etching is described in the paper. The fabricated silicon material is suitable to be used as porous silicon for Ge/Si quantum dots growth or other applications. Single exposure holographic method was adopted to fabricate the photoresist mask with the pattern of 2D hexagonal lattice structure. HF:HNO3:CH3COOH = 4:4:3 solution was used to etch circular pores with bowl-shaped bottom into silicon substrate at room temperature with 30 s etching time. Periodic structure in silicon with 1 μm lattice constant and 200 nm pore depth was obtained in the experiment. The fabrication process is fast and cost-effective thus having the potential for industrial mass production of porous silicon.

A NOVEL FABRICATION METHOD OF TWO-DIMENSIONAL NANO-MOLD BY COMBINING ULTRAVIOLET LITHOGRAPHY WITH WET ETCHING TECHNOLOGY

2020 ◽  
pp. 2050028
Author(s):  
E CHENG ◽  
SUZHOU TANG ◽  
LINGPENG LIU ◽  
HELIN ZOU ◽  
ZHENGYAN ZHANG
Keyword(s):  
Low Cost ◽  
Wet Etching ◽  
Etching Time ◽  
Two Dimensional ◽  
Cross Sectional ◽  
Ultraviolet Lithography ◽  
Uv Lithography ◽  
Fluidic Devices ◽  
Mold Fabrication

Nano-fluidic devices have great potential in the applications of biology, chemistry, and medicine. However, their applications have been hampered by their expensive or complicated fabrication methods. We present a new and simple approach to fabricate low-cost two-dimensional (2D) nano-mold based on ultraviolet (UV) lithography and wet etching. The influence of UV lithography parameters on the width dimension of AZ5214 photoresist was investigated. With the optimized parameters of UV lithography, the width dimension of photoresist patterns had sharply decreased from microscale to nano-scale. At the same time, the influences of etching time on the over-etching amount of SiO2 film and nano-mold depth were also analyzed for further reducing the width of nano-mold. In addition, the effect of photoresist mesas deformation on the nano-mold fabrication was also studied for improving the quality of nano-mold. By the proposed method, trapezoid cross-sectional 2D nano-mold with different dimensions can be obtained for supporting varied applications. The minimum nano-mold arrays we fabricated are the ones with the dimensions of 115[Formula: see text]nm in top edge, 284[Formula: see text]nm in bottom edge, and 136[Formula: see text]nm in depth. This method provides a low-cost way to fabricate high-quality and high-throughput 2D nano-mold.

Two-dimensional photonic crystals fabricated by wet etching of silicon

2010 ◽  
Author(s):  
Jung-Il Kim ◽  
Seok-Gy Jeon ◽  
Geun-Ju Kim ◽  
Jaehong Kim ◽  
Huyn-Haeng Lee ◽  
...  
Keyword(s):  
Photonic Crystals ◽  
Wet Etching ◽  
Two Dimensional

scholarly journals Negative Propagation Effects in Two-Dimensional Silicon Photonic Crystals

2012 ◽  
Vol 2012 ◽  
pp. 1-7
Author(s):  
Ping Jiang ◽  
Kang Xie ◽  
Huajun Yang ◽  
Zhenhai Wu
Keyword(s):  
Photonic Crystals ◽  
Eigenvalue Problems ◽  
Negative Refraction ◽  
Hexagonal Lattice ◽  
Fdtd Method ◽  
Expansion Method ◽  
Complex Eigenvalue ◽  
Two Dimensional ◽  
Negative Index ◽  
Silicon Photonic

We demonstrated negative refraction effects of light propagating in two-dimensional square and hexagonal-lattice silicon photonic crystals (PhCs). The plane wave expansion method was used to solve the complex eigenvalue problems, as well as to find dispersion curves and equal-frequency contour (EFC). The finite-difference time-domain (FDTD) method was used to simulate and visualize electromagnetic wave propagation and scattering in the PhCs. Theoretical analyses and numerical simulations are presented. Two different kinds of negative refractions, namely, all-angle negative refraction (AANR) without a negative index and negative refraction with effective negative index, have been verified and compared.

Elastic Properties and Nonlinear Elasticity of the Noncarbon Hexagonal Lattice Nanomaterials Based on the Multiscale Modeling

2020 ◽  
Vol 143 (2) ◽  
Author(s):  
Sandeep Singh ◽  
B. M. Ravi Raj ◽  
Kiran D. Mali ◽  
Gaurav Watts
Keyword(s):  
Elastic Properties ◽  
Nonlinear Elasticity ◽  
Interatomic Potential ◽  
Lattice Structure ◽  
Hexagonal Lattice ◽  
Experimental Investigations ◽  
Continuum Approximation ◽  
Two Dimensional ◽  
Bending Rigidity ◽  
Bending Modulus

Abstract This study presents the elastic properties and nonlinear elasticity of the two-dimensional noncarbon nanomaterials of hexagonal lattice structures having molecular structure XY. Four nitride-based and two phosphide-based two-dimensional nanomaterials, having graphene-like hexagonal lattice structure, are considered in the present study. The four empirical parameters associated with the attractive and repulsive terms of the Tersoff–Brenner potential are calibrated for noncarbon nanomaterials and tested for elastic properties, nonlinear constitutive behavior, bending modulus, bending and torsional energy. The mathematical identities for the tangent constitutive matrix in terms of the interatomic potential function are derived through an atomistic–continuum coupled multiscale framework of the extended version of Cauchy–Born rule. The results obtained using newly calibrated empirical parameters for cohesive energy, bond length, elastic properties, and bending rigidity are compared with those reported in the literature through experimental investigations and quantum mechanical calculations. The continuum approximation is attained through the finite element method. Multiscale evaluations for elastic properties and nonlinear stretching of the nanosheets under in-plane loads are also compared with those obtained from atomistic simulations.

Preparation of two-dimensional yttrium iron garnet magnonic crystal on porous silicon substrate

2014 ◽  
Vol 123 ◽  
pp. 181-183 ◽  
Author(s):  
H. Zheng ◽  
J.J. Zhou ◽  
J.X. Deng ◽  
P. Zheng ◽  
L. Zheng ◽  
...  
Keyword(s):  
Porous Silicon ◽  
Silicon Substrate ◽  
Yttrium Iron Garnet ◽  
Two Dimensional ◽  
Yttrium Iron ◽  
Magnonic Crystal ◽  
Porous Silicon Substrate ◽  
Iron Garnet

Compact triplexer in two-dimensional hexagonal lattice photonic crystals

2011 ◽  
Vol 9 (4) ◽  
pp. 042501-42504
Author(s):  
任宏亮 Hongliang Ren ◽  
马建平 Jianping Ma ◽  
温浩 Hao Wen ◽  
覃亚丽 Yali Qin ◽  
吴哲夫 Zhefu Wu ◽  
...  
Keyword(s):  
Photonic Crystals ◽  
Hexagonal Lattice ◽  
Two Dimensional
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