180 GHz f/sub T/ and f/sub max/ self-aligned SiGeC HBT using selective epitaxial growth of the base

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Epitaxial Growth ◽  
Selective Epitaxial Growth

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Selective epitaxial growth of silicon in pancake reactors

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pp. 2031-2036 ◽  
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M. Kastelic ◽  
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J.A. Friedrich ◽  
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Epitaxial Growth ◽  
Selective Epitaxial Growth

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Wakana Takeuchi ◽  
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Chemical Vapor Deposition ◽  
Epitaxial Growth ◽  
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J. Böck ◽  
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Keyword(s):  
Epitaxial Growth ◽  
High Speed ◽  
Selective Epitaxial Growth
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