Fluorinated amorphous carbon thin films: Analysis of the role of the plasma excitation mode on the structural and mechanical properties

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1621402 ◽

2003 ◽

Vol 21 (6) ◽

pp. 1964-1970 ◽

Author(s):

L. Valentini ◽

M. C. Bellachioma ◽

S. I.-U. Ahmed ◽

G. Bregliozzi ◽

Y. Gerbig ◽

...

Keyword(s):

Mechanical Properties ◽

Amorphous Carbon ◽

Excitation Mode ◽

Plasma Excitation ◽

Carbon Thin Films

Download Full-text

Temperature dependence of the mechanical properties of tetrahedrally coordinated amorphous carbon thin films

Applied Physics Letters ◽

10.1063/1.2108132 ◽

2005 ◽

Vol 87 (16) ◽

pp. 161915 ◽

Author(s):

David A. Czaplewski ◽

J. P. Sullivan ◽

T. A. Friedmann ◽

J. R. Wendt

Keyword(s):

Mechanical Properties ◽

Temperature Dependence ◽

Amorphous Carbon ◽

Carbon Thin Films

Download Full-text

Near-surface mechanical properties and surface morphology of hydrogenated amorphous carbon thin films

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2005.11.010 ◽

2006 ◽

Vol 200 (22-23) ◽

pp. 6400-6404 ◽

Author(s):

S.N. Kassavetis ◽

S. Logothetidis ◽

G.M. Matenoglou

Keyword(s):

Mechanical Properties ◽

Surface Morphology ◽

Amorphous Carbon ◽

Near Surface ◽

Hydrogenated Amorphous Carbon ◽

Carbon Thin Films ◽

Hydrogenated Amorphous

Download Full-text

Influence of bonding environment on nano-mechanical properties of nitrogen containing hydrogenated amorphous carbon thin films

Materials Chemistry and Physics ◽

10.1016/j.matchemphys.2011.07.060 ◽

2011 ◽

Vol 130 (1-2) ◽

pp. 775-785 ◽

Author(s):

Neeraj Dwivedi ◽

Sushil Kumar ◽

H.K. Malik ◽

C.M.S. Rauthan ◽

O.S. Panwar

Keyword(s):

Mechanical Properties ◽

Amorphous Carbon ◽

Hydrogenated Amorphous Carbon ◽

Carbon Thin Films ◽

Hydrogenated Amorphous

Download Full-text

Role of nanostructure on electron field emission from amorphous carbon thin films

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1593642 ◽

2003 ◽

Vol 21 (4) ◽

pp. 1633 ◽

Author(s):

J. D. Carey ◽

R. D. Forrest ◽

C. H. Poa ◽

S. R. P. Silva

Keyword(s):

Field Emission ◽

Amorphous Carbon ◽

Electron Field Emission ◽

Electron Field ◽

Carbon Thin Films

Download Full-text

Relationship between the optical and mechanical properties of fluorinated amorphous carbon thin films

Journal of Non-Crystalline Solids ◽

10.1016/s0022-3093(01)00862-6 ◽

2001 ◽

Vol 291 (3) ◽

pp. 153-159 ◽

Author(s):

L Valentini ◽

E Braca ◽

J.M Kenny ◽

L Lozzi ◽

S Santucci

Keyword(s):

Mechanical Properties ◽

Amorphous Carbon ◽

Carbon Thin Films ◽

Optical And Mechanical Properties

Download Full-text

Structural, morphological, and mechanical properties of plasma deposited hydrogenated amorphous carbon thin films: Ar gas dilution effects

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1336829 ◽

2001 ◽

Vol 19 (4) ◽

pp. 1611-1616 ◽

Author(s):

L. Valentini ◽

J. M. Kenny ◽

G. Mariotto ◽

P. Tosi ◽

G. Carlotti ◽

...

Keyword(s):

Mechanical Properties ◽

Amorphous Carbon ◽

Hydrogenated Amorphous Carbon ◽

Carbon Thin Films ◽

Gas Dilution ◽

Ar Gas ◽

Dilution Effects ◽

Hydrogenated Amorphous

Download Full-text

Fluorinated amorphous carbon thin films: Analysis of the role of the plasma source frequency on the structural and optical properties

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1378071 ◽

2001 ◽

Vol 19 (5) ◽

pp. 2168-2173 ◽

Author(s):

L. Valentini ◽

E. Braca ◽

J. M. Kenny ◽

L. Lozzi ◽

S. Santucci

Keyword(s):

Optical Properties ◽

Amorphous Carbon ◽

Plasma Source ◽

Structural And Optical Properties ◽

Carbon Thin Films

Download Full-text

Role of delocalized nitrogen in determining the local atomic arrangement and mechanical properties of amorphous carbon nitride thin films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1308592 ◽

2000 ◽

Vol 18 (6) ◽

pp. 2964-2971 ◽

Author(s):

B. C. Holloway ◽

O. Kraft ◽

D. K. Shuh ◽

W. D. Nix ◽

M. Kelly ◽

...

Keyword(s):

Mechanical Properties ◽

Amorphous Carbon ◽

Carbon Nitride ◽

Atomic Arrangement ◽

Local Atomic Arrangement ◽

Amorphous Carbon Nitride

Download Full-text

Role of Metallic NiCr Dots on the Adhesion, Electrical, Optical and Mechanical Properties of Diamond-like Carbon Thin Films

Plasma Processes and Polymers ◽

10.1002/ppap.201000087 ◽

2011 ◽

Vol 8 (2) ◽

pp. 100-107 ◽

Author(s):

Neeraj Dwivedi ◽

Sushil Kumar ◽

Chandra Mohan Singh Rauthan ◽

Omvir Singh Panwar

Keyword(s):

Mechanical Properties ◽

Diamond Like Carbon ◽

Carbon Thin Films ◽

Optical And Mechanical Properties

Download Full-text

Effects of plasma excitation power, sample bias, and duty cycle on the structure and surface properties of amorphous carbon thin films fabricated on AISI440 steel by plasma immersion ion implantation

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1285996 ◽

2000 ◽

Vol 18 (5) ◽

pp. 2164 ◽

Author(s):

Z. M. Zeng ◽

X. B. Tian ◽

T. K. Kwok ◽

B. Y. Tang ◽

M. K. Fung ◽

...

Keyword(s):

Ion Implantation ◽

Surface Properties ◽

Amorphous Carbon ◽

Excitation Power ◽

Sample Bias ◽

Plasma Excitation ◽

Plasma Immersion Ion Implantation ◽

Carbon Thin Films

Download Full-text