Remarkably efficient acid generation in chemically amplified resist from quantum chemistry modeling
2014 ◽
Vol 53
(7)
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pp. 076502
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2007 ◽
Vol 46
(No. 40)
◽
pp. L979-L981
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1994 ◽
Vol 12
(6)
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pp. 3879
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1991 ◽
Vol 9
(6)
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pp. 3380
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Keyword(s):
2000 ◽
Vol 147
(10)
◽
pp. 3833
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