Conformal metal thin-film coatings in high-aspect-ratio trenches using a self-sputtered rf-driven plasma source
2007 ◽
Vol 25
(4)
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pp. 1227
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2001 ◽
Vol 350
(1-2)
◽
pp. 1-16
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2005 ◽
Vol 14
(2)
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pp. 183-186
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2012 ◽
Vol 23
(15)
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pp. 1895-1902
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Keyword(s):
2006 ◽
Vol 39
(8)
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pp. 814-817
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