Numerical investigation via three-dimensional Monte Carlo modeling of sputtering and deposition processes in a direct current unbalanced magnetron discharge
2008 ◽
Vol 26
(1)
◽
pp. 103-113
◽
2012 ◽
Vol 59
(5)
◽
pp. 1454-1461
◽
Keyword(s):
Keyword(s):
Keyword(s):
2016 ◽
Vol 588
◽
pp. A134
◽
1997 ◽
Vol 36
(Part 1, No. 7B)
◽
pp. 4808-4814
◽
Keyword(s):