Analysis of Three-Dimensional DC Magnetron Discharge by the Particle-in-Cell/Monte Carlo Method
1997 ◽
Vol 36
(Part 1, No. 7B)
◽
pp. 4808-4814
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Keyword(s):
1999 ◽
Vol 32
(10)
◽
pp. 1142-1152
◽
Keyword(s):
1988 ◽
Vol 52
(2)
◽
pp. 270-274
◽
Keyword(s):
2014 ◽
Vol 342
(10-11)
◽
pp. 662-670
◽
Keyword(s):
1991 ◽
Vol 57
(542)
◽
pp. 3491-3498
◽
Keyword(s):
2007 ◽
Vol 21
(23n24)
◽
pp. 4219-4224
◽
1970 ◽
Vol 43
(4)
◽
pp. 1006-1010
◽