Fabrication of annular photonic crystals by atomic layer deposition and sacrificial etching

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.3079662 ◽

2009 ◽

Vol 27 (2) ◽

pp. 568 ◽

Author(s):

Junbo Feng ◽

Yao Chen ◽

John Blair ◽

Hamza Kurt ◽

Ran Hao ◽

...

Keyword(s):

Photonic Crystals ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Layer Deposition ◽

Sacrificial Etching

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Photonic band tuning in 2D photonic crystals by atomic layer deposition

2006 IEEE LEOS Annual Meeting Conference Proceedings ◽

10.1109/leos.2006.278973 ◽

2006 ◽

Author(s):

Elton Graugnard ◽

Davy Gaillot ◽

Simon Dunham ◽

Curtis Neff ◽

Tsuyoshi Yamashita ◽

...

Keyword(s):

Photonic Crystals ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Layer Deposition ◽

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Selective Modification of Opal Photonic Crystals Using Atomic Layer Deposition

Photonic Metamaterials: From Random to Periodic ◽

10.1364/meta.2006.thd14 ◽

2006 ◽

Author(s):

Zachary A. Sechrist ◽

Brian T. Schwartz ◽

Jin H. Lee ◽

Jarod A. McCormick ◽

Wounjhang Park ◽

...

Keyword(s):

Photonic Crystals ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Layer Deposition

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Fabrication of wafer-scale TiO2 nanobowl arrays via a scooping transfer of polystyrene nanospheres and atomic layer deposition for their application in photonic crystals

Journal of Materials Chemistry C ◽

10.1039/c2tc00652a ◽

2013 ◽

Vol 1 (9) ◽

pp. 1732 ◽

Author(s):

Hoo Keun Park ◽

Seong Woong Yoon ◽

Da Yeon Choi ◽

Young Rag Do

Keyword(s):

Photonic Crystals ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Wafer Scale ◽

Layer Deposition ◽

Polystyrene Nanospheres

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Atomic layer deposition for the fabrication of 3D photonic crystals structures: Growth of Al2O3 and VO2 photonic crystal systems

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2007.04.108 ◽

2007 ◽

Vol 201 (22-23) ◽

pp. 9345-9348 ◽

Author(s):

I.M. Povey ◽

M. Bardosova ◽

F. Chalvet ◽

M.E. Pemble ◽

H.M. Yates

Keyword(s):

Photonic Crystal ◽

Photonic Crystals ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Layer Deposition

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Atomic layer deposition in porous structures: 3D photonic crystals

Applied Surface Science ◽

10.1016/j.apsusc.2004.10.110 ◽

2005 ◽

Vol 244 (1-4) ◽

pp. 511-516 ◽

Author(s):

J.S. King ◽

D. Heineman ◽

E. Graugnard ◽

C.J. Summers

Keyword(s):

Photonic Crystals ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Porous Structures ◽

Layer Deposition

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Replicated photonic crystals by atomic layer deposition within holographically defined polymer templates

Applied Physics Letters ◽

10.1063/1.3159834 ◽

2009 ◽

Vol 94 (26) ◽

pp. 263109 ◽

Author(s):

E. Graugnard ◽

O. M. Roche ◽

S. N. Dunham ◽

J. S. King ◽

D. N. Sharp ◽

...

Keyword(s):

Photonic Crystals ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Polymer Templates ◽

Layer Deposition

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Fabrication of Three-Dimensional Photonic Crystals by Templated Atomic Layer Deposition

Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing ◽

10.1364/fio.2008.ftup4 ◽

2008 ◽

Author(s):

Christopher J. Summers ◽

Elton Graugnard ◽

Davy P. Gaillot ◽

John Blair

Keyword(s):

Photonic Crystals ◽

Atomic Layer Deposition ◽

Three Dimensional ◽

Atomic Layer ◽

Layer Deposition

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Tunable electro-optic photonic crystals fabricated through template directed multilayer atomic layer deposition

10.1117/12.663160 ◽

2006 ◽

Author(s):

Davy P. Gaillot ◽

Elton Graugnard ◽

Jeffrey S. King ◽

Christopher J. Summers

Keyword(s):

Photonic Crystals ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Layer Deposition ◽

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Dataset of ptychographic X-ray computed tomography of inverse opal photonic crystals produced by atomic layer deposition

Data in Brief ◽

10.1016/j.dib.2018.10.076 ◽

2018 ◽

Vol 21 ◽

pp. 1924-1936 ◽

Author(s):

Kaline P. Furlan ◽

Emanuel Larsson ◽

Ana Diaz ◽

Mirko Holler ◽

Tobias Krekeler ◽

...

Keyword(s):

Computed Tomography ◽

Photonic Crystals ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

Inverse Opal ◽

X Ray ◽

Layer Deposition ◽

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Tuning the Absolute Band Gap of Silicon Photonic Crystals by Atomic Layer Deposition (ALD) Interfacial Layers

ECS Transactions ◽

10.1149/1.2779089 ◽

2019 ◽

Vol 11 (7) ◽

pp. 259-267

Author(s):

Makhin Thitsa ◽

Diefeng Gu ◽

Helmut Baumgart ◽

Sacharia Albin

Keyword(s):

Photonic Crystals ◽

Atomic Layer Deposition ◽

Band Gap ◽

Atomic Layer ◽

Interfacial Layers ◽

Layer Deposition ◽

Silicon Photonic ◽

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