Fabrication of ZnO photonic crystals by nanosphere lithography using inductively coupled-plasma reactive ion etching with CH4/H2/Ar plasma on the ZnO/GaN heterojunction light emitting diodes

2010 ◽  
Vol 28 (4) ◽  
pp. 745-749 ◽  
Author(s):  
Shr-Jia Chen ◽  
Chun-Ming Chang ◽  
Jiann-Shiun Kao ◽  
Fu-Rong Chen ◽  
Chuen-Horng Tsai
Keyword(s):  
Photonic Crystals ◽  
Inductively Coupled Plasma ◽  
Light Emitting Diodes ◽  
Reactive Ion Etching ◽  
Nanosphere Lithography ◽  
Ion Etching ◽  
Light Emitting ◽  
Inductively Coupled ◽  
Ar Plasma

Inductively coupled plasma reactive ion etching of copper thin films using ethylenediamine/butanol/Ar plasma

Vacuum ◽  
2020 ◽  
Vol 181 ◽  
pp. 109421
Author(s):  
Moon Hwan Cha ◽  
Eun Taek Lim ◽  
Sung Yong Park ◽  
Ji Su Lee ◽  
Chee Won Chung
Keyword(s):  
Thin Films ◽  
Inductively Coupled Plasma ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Inductively Coupled ◽  
Ar Plasma

Inductively coupled plasma reactive ion etching of titanium nitride thin films in a Cl2/Ar plasma

2008 ◽  
Vol 14 (3) ◽  
pp. 297-302 ◽  
Author(s):  
Su Ryun Min ◽  
Han Na Cho ◽  
Yue Long Li ◽  
Sung Keun Lim ◽  
Seung Pil Choi ◽  
...  
Keyword(s):  
Thin Films ◽  
Titanium Nitride ◽  
Inductively Coupled Plasma ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Inductively Coupled ◽  
Ar Plasma

Inductively coupled plasma-reactive ion etching of InSb using CH4∕H2∕Ar plasma

2009 ◽  
Vol 27 (4) ◽  
pp. 681-685 ◽  
Author(s):  
Guo-Dong Zhang ◽  
Wei-Guo Sun ◽  
Shu-Li Xu ◽  
Hong-Yan Zhao ◽  
Hong-Yi Su ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Inductively Coupled ◽  
Ar Plasma

Inductively Coupled Plasma Mesa Etched InGaN/GaN Light Emitting Diodes Using Cl2/BCl3/Ar Plasma

2006 ◽  
Vol 45 (9A) ◽  
pp. 6800-6802 ◽  
Author(s):  
Tzong-Bin Wang ◽  
Wei-Chou Hsu ◽  
Yen-Wei Che ◽  
Yeong-Jia Chen
Keyword(s):  
Inductively Coupled Plasma ◽  
Light Emitting Diodes ◽  
Light Emitting ◽  
Inductively Coupled ◽  
Ar Plasma

Inductively coupled plasma reactive ion etching of ZnO films in HBr/Ar plasma

2008 ◽  
Vol 516 (11) ◽  
pp. 3521-3529 ◽  
Author(s):  
Su Ryun Min ◽  
Han Na Cho ◽  
Yue Long Li ◽  
Chee Won Chung
Keyword(s):  
Inductively Coupled Plasma ◽  
Reactive Ion Etching ◽  
Zno Films ◽  
Ion Etching ◽  
Inductively Coupled ◽  
Ar Plasma

Fabrication of GaN-based LEDs with 22° undercut sidewalls by inductively coupled plasma reactive ion etching

2013 ◽  
Vol 22 (10) ◽  
pp. 106802
Author(s):  
Bo Wang ◽  
Shi-Chen Su ◽  
Miao He ◽  
Hong Chen ◽  
Wen-Bo Wu ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Inductively Coupled
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