Structural characterization of lead zirconate titanate thin films prepared on different electrodes and on silicon substrates

Marco Natali; Denis Garoli; Valentino Rigato; Filippo Romanato

doi:10.1116/1.3635366

Structural characterization of lead zirconate titanate thin films prepared on different electrodes and on silicon substrates

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3635366 ◽

2011 ◽

Vol 29 (6) ◽

pp. 061505 ◽

Cited By ~ 3

Author(s):

Marco Natali ◽

Denis Garoli ◽

Valentino Rigato ◽

Filippo Romanato

Keyword(s):

Thin Films ◽

Lead Zirconate Titanate ◽

Structural Characterization ◽

Lead Zirconate ◽

Silicon Substrates ◽

Zirconate Titanate

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Characterization of Sputtered Lead-Zirconate-Titanate Thin Films with Various Compositions

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.3600 ◽

1999 ◽

Vol 38 (Part 1, No. 6A) ◽

pp. 3600-3603 ◽

Cited By ~ 6

Author(s):

Tomoyuki Sakoda ◽

Katsuhiro Aoki ◽

Yukio Fukuda

Keyword(s):

Thin Films ◽

Lead Zirconate Titanate ◽

Lead Zirconate ◽

Zirconate Titanate

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Characterization of seeded sol–Gel lead zirconate titanate thin films

Journal of the European Ceramic Society ◽

10.1016/s0955-2219(98)00445-2 ◽

1999 ◽

Vol 19 (6-7) ◽

pp. 1403-1407 ◽

Cited By ~ 11

Author(s):

Aiying Wu ◽

Paula M. Vilarinho ◽

Isabel M.Miranda Salvado ◽

João L. Baptista ◽

C.M. de Jesus ◽

...

Keyword(s):

Thin Films ◽

Lead Zirconate Titanate ◽

Sol Gel ◽

Lead Zirconate ◽

Zirconate Titanate

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Preparation and Characterization of Lead Zirconate Titanate Heterolayered Thin Films on Pt/Ti/SiO2/Si Substrate by Sol–Gel Method

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.217 ◽

1999 ◽

Vol 38 (Part 1, No. 1A) ◽

pp. 217-218 ◽

Cited By ~ 2

Author(s):

Sung-Gap Lee ◽

Kwang-Taek Shim ◽

Young-Hie Lee

Keyword(s):

Thin Films ◽

Lead Zirconate Titanate ◽

Sol Gel ◽

Lead Zirconate ◽

Si Substrate ◽

Gel Method ◽

Sol Gel Method ◽

Zirconate Titanate

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Characterization of Switching Properties of Lead-Zirconate-Titanate Thin Films in Ti-Rich Phase

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.l522 ◽

1998 ◽

Vol 37 (Part 2, No. 5A) ◽

pp. L522-L524 ◽

Cited By ~ 9

Author(s):

Katsuhiro Aoki ◽

Tomoyuki Sakoda ◽

Yukio Fukuda

Keyword(s):

Thin Films ◽

Lead Zirconate Titanate ◽

Lead Zirconate ◽

Rich Phase ◽

Zirconate Titanate

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Growth and characterization of lead zirconate titanate (PZT) thin films

Optics and Precision Engineering ◽

10.3788/ope.20132111.2893 ◽

2013 ◽

Vol 21 (11) ◽

pp. 2893-2899 ◽

Cited By ~ 1

Author(s):

张翊 ZHANG Yi ◽

潘峰 PAN Feng ◽

包达群 BAO Da-qun ◽

王建艳 WANG Jian-yan ◽

郭航 GUO Hang

Keyword(s):

Thin Films ◽

Lead Zirconate Titanate ◽

Lead Zirconate ◽

Pzt Thin Films ◽

Zirconate Titanate

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Development and electrical characterization of lead zirconate titanate thick films on silicon substrates

Proceedings of 1994 IEEE International Symposium on Applications of Ferroelectrics ◽

10.1109/isaf.1994.522412 ◽

2002 ◽

Cited By ~ 1

Author(s):

H.D. Chen ◽

K.R. Udayakumar ◽

L.E. Cross ◽

J.J. Bernstein ◽

L.C. Niles

Keyword(s):

Lead Zirconate Titanate ◽

Thick Films ◽

Electrical Characterization ◽

Lead Zirconate ◽

Silicon Substrates ◽

Zirconate Titanate

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Preparation and characterization of lead zirconate titanate thin films grown by RF magnetron sputtering for pyroelectric infrared detector arrays

Ceramics International ◽

10.1016/j.ceramint.2018.08.352 ◽

2018 ◽

Vol 44 ◽

pp. S7-S10 ◽

Cited By ~ 1

Author(s):

Huifeng Zhao ◽

Xuesen Liu ◽

Wei Ren ◽

Yijun Zhang

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Lead Zirconate Titanate ◽

Infrared Detector ◽

Rf Magnetron Sputtering ◽

Lead Zirconate ◽

Detector Arrays ◽

Zirconate Titanate

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Preparation and optical characterization of lanthanum modified lead zirconate titanate thin films on indium-doped tin oxide-coated glass substrate

Thin Solid Films ◽

10.1016/j.tsf.2006.06.038 ◽

2006 ◽

Vol 515 (4) ◽

pp. 1782-1787 ◽

Cited By ~ 12

Author(s):

A. Khodorov ◽

M.J.M. Gomes

Keyword(s):

Thin Films ◽

Lead Zirconate Titanate ◽

Tin Oxide ◽

Glass Substrate ◽

Optical Characterization ◽

Lead Zirconate ◽

Coated Glass Substrate ◽

Coated Glass ◽

Zirconate Titanate

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Studies on the Nature of a Lead Zirconate Titanate (PZT) Precursor Solution. Isolation and Structural Characterization of [PbZr2(O)(OOCCH3)2(OCH2CH3)6]2

Chemistry of Materials ◽

10.1021/cm00043a001 ◽

1994 ◽

Vol 6 (7) ◽

pp. 875-877 ◽

Cited By ~ 26

Author(s):

Linqing Ma ◽

David A. Payne

Keyword(s):

Lead Zirconate Titanate ◽

Structural Characterization ◽

Precursor Solution ◽

Lead Zirconate ◽

Zirconate Titanate

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Properties of sol-gel-derived lead zirconate titanate (PZT) thin films on platinum-coated silicon substrates

ISAF '96. Proceedings of the Tenth IEEE International Symposium on Applications of Ferroelectrics ◽

10.1109/isaf.1996.602801 ◽

2002 ◽

Author(s):

Fei Xu ◽

S. Trolier-McKinstry

Keyword(s):

Thin Films ◽

Lead Zirconate Titanate ◽

Sol Gel ◽

Lead Zirconate ◽

Silicon Substrates ◽

Pzt Thin Films ◽

Zirconate Titanate

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