High rate roll to roll atomic layer deposition, and its application to moisture barriers on polymer films
2012 ◽
Vol 30
(2)
◽
pp. 021502
◽
Keyword(s):
Keyword(s):
Keyword(s):
2015 ◽
Vol 7
(24)
◽
pp. 13154-13163
◽
Keyword(s):
Keyword(s):
2018 ◽
Vol 1
(7)
◽
pp. 3277-3282
◽
Keyword(s):
2020 ◽
Vol 38
(5)
◽
pp. 052409
Keyword(s):
Keyword(s):