scholarly journals Formation of nickel germanides from Ni layers with thickness below 10 nm

Author(s):  
Lukas Jablonka ◽  
Tomas Kubart ◽  
Daniel Primetzhofer ◽  
Ahmad Abedin ◽  
Per-Erik Hellström ◽  
...  
Keyword(s):  
2007 ◽  
Vol 50 (3) ◽  
pp. 677 ◽  
Author(s):  
Jae-Wook Jae-Wook ◽  
Kyung-Hwan Kyung-Hwan ◽  
Hyoungsub Hyoungsub ◽  
Cheol-Woong Cheol-Woong ◽  
Dongwon Dongwon ◽  
...  

2004 ◽  
Vol 810 ◽  
Author(s):  
K.Y. Lee ◽  
S.L. Liew ◽  
S.J. Chua ◽  
D.Z. Chi ◽  
H.P. Sun ◽  
...  

ABSTRACTPhase formation and interfacial microstructure evolution of nickel germanides formed by rapid thermal annealing in a 15-nm Ni/Ge (100) system have been studied. Coexistence of a NiGe layer and Ni-rich germanide particles was detected at 250°C. Highly textured NiGe film with a smooth interface with Ge was observed. Annealing at higher temperatures resulted in grain growth and severe grooving of the NiGe film at the substrate side, followed by serious agglomeration above 500°C. Fairly low sheet resistance was achieved in 250-500°C where the NiGe film continuity was uninterrupted.


2014 ◽  
Vol 120 ◽  
pp. 168-173 ◽  
Author(s):  
B. De Schutter ◽  
W. Devulder ◽  
A. Schrauwen ◽  
K. van Stiphout ◽  
T. Perkisas ◽  
...  

2019 ◽  
Vol 16 (10) ◽  
pp. 249-253 ◽  
Author(s):  
Cheng-Yi Peng ◽  
Ching-Fang Huang ◽  
Ying-Jhe Yang ◽  
Chee Wee Liu
Keyword(s):  

2015 ◽  
Vol 225 ◽  
pp. 193-201 ◽  
Author(s):  
A.V. Morozkin ◽  
A.V. Knotko ◽  
V.O. Yapaskurt ◽  
Fang Yuan ◽  
Y. Mozharivskyj ◽  
...  

ChemInform ◽  
2015 ◽  
Vol 46 (14) ◽  
pp. no-no
Author(s):  
A. V. Morozkin ◽  
A. V. Knotko ◽  
V. O. Yapaskurt ◽  
Fang Yuan ◽  
Y. Mozharivskyj ◽  
...  

2016 ◽  
Vol 119 (13) ◽  
pp. 135305 ◽  
Author(s):  
B. De Schutter ◽  
K. Van Stiphout ◽  
N. M. Santos ◽  
E. Bladt ◽  
J. Jordan-Sweet ◽  
...  

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