AlN and AlN/Al2O3 seed layers from atomic layer deposition for epitaxial growth of AlN on sapphire

2019 ◽  
Vol 37 (2) ◽  
pp. 020914 ◽  
Author(s):  
Sylvia Hagedorn ◽  
Arne Knauer ◽  
Markus Weyers ◽  
Franziska Naumann ◽  
Hassan Gargouri
Keyword(s):  
Atomic Layer Deposition ◽  
Epitaxial Growth ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Seed Layers

scholarly journals Epitaxial Growth of MgxCa1–xO on GaN by Atomic Layer Deposition

Nano Letters ◽  
2016 ◽  
Vol 16 (12) ◽  
pp. 7650-7654 ◽  
Author(s):  
Xiabing Lou ◽  
Hong Zhou ◽  
Sang Bok Kim ◽  
Sami Alghamdi ◽  
Xian Gong ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Epitaxial Growth ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation

2020 ◽  
Vol 53 (34) ◽  
pp. 345105
Author(s):  
A V Uvarov ◽  
A S Gudovskikh ◽  
V N Nevedomskiy ◽  
A I Baranov ◽  
D A Kudryashov ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Epitaxial Growth ◽  
Atomic Layer ◽  
Plasma Activation ◽  
Layer Deposition

Epitaxial growth of LaAlO3 on SrTiO3-buffered Si (001) substrates by atomic layer deposition

2013 ◽  
Vol 363 ◽  
pp. 150-157 ◽  
Author(s):  
Thong Q. Ngo ◽  
Agham Posadas ◽  
Martin D. McDaniel ◽  
Domingo A. Ferrer ◽  
John Bruley ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Epitaxial Growth ◽  
Atomic Layer ◽  
Layer Deposition

Epitaxial growth of TiO2 films in a hydroxyl-free atomic layer deposition process

2002 ◽  
Vol 235 (1-4) ◽  
pp. 293-299 ◽  
Author(s):  
Mikael Schuisky ◽  
Kaupo Kukli ◽  
Jaan Aarik ◽  
Jun Lu ◽  
Anders Hårsta
Keyword(s):  
Atomic Layer Deposition ◽  
Epitaxial Growth ◽  
Atomic Layer ◽  
Deposition Process ◽  
Tio2 Films ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition

Epitaxial growth of cobalt oxide by atomic layer deposition

2007 ◽  
Vol 307 (2) ◽  
pp. 457-465 ◽  
Author(s):  
K.B. Klepper ◽  
O. Nilsen ◽  
H. Fjellvåg
Keyword(s):  
Atomic Layer Deposition ◽  
Epitaxial Growth ◽  
Cobalt Oxide ◽  
Atomic Layer ◽  
Layer Deposition
Sign in / Sign up

Export Citation Format

Share Document